NATURE OF POINT DEFECTS AND THEIR INFLUENCE ON DIFFUSION PROCESSES IN SILICON AT HIGH TEMPERATURES.

Published

Journal Article

Duke Authors

Cited Authors

  • Goesele, U; Tan, TY

Published Date

  • January 1, 1983

Published In

Volume / Issue

  • 14 /

Start / End Page

  • 45 - 59

International Standard Serial Number (ISSN)

  • 0272-9172

Citation Source

  • Scopus