NATURE OF POINT DEFECTS AND THEIR INFLUENCE ON DIFFUSION PROCESSES IN SILICON AT HIGH TEMPERATURES.

Duke Authors

Cited Authors

  • Goesele, U; Tan, TY

Published Date

  • 1983

Published In

  • Materials Research Society Symposia Proceedings

Volume / Issue

  • 14 /

Start / End Page

  • 45 - 59

Citation Source

  • SciVal