Deep UV nano-microstructuring of substrates for surface plasmon resonance imaging.

Journal Article (Journal Article)

In this paper, we describe wafer-scale fabrication and characterization of plasmonic chips-containing different sizes and spacings of metallic micro- and nanoline structures-using deep UV lithography. Using a high dose (25 mJ cm( - 2)) and a proper lift-off process, feature sizes as small as 25 nm are obtained. Moreover, we study the dependence of surface plasmon resonance on the angle of incidence and wavelength for different micro- and nanoline size and spacing values, yielding localized to quasi-propagative plasmonic behaviors. Rigorous coupled wave analysis (RCWA) techniques are employed to numerically confirm these experimental observations. Finally, the refractive index of media around the SPRI sensor chips is varied, showing the angulo-spectral regions of higher sensitivity for each type of structure.

Full Text

Duke Authors

Cited Authors

  • Dhawan, A; Duval, A; Nakkach, M; Barbillon, G; Moreau, J; Canva, M; Vo-Dinh, T

Published Date

  • April 2011

Published In

Volume / Issue

  • 22 / 16

Start / End Page

  • 165301 -

PubMed ID

  • 21393822

Electronic International Standard Serial Number (EISSN)

  • 1361-6528

International Standard Serial Number (ISSN)

  • 0957-4484

Digital Object Identifier (DOI)

  • 10.1088/0957-4484/22/16/165301


  • eng