Nanofabrication at high throughput and low cost.

Review

The task of nanofabrication can, in principle, be divided into two separate tracks: generation and replication of the patterned features. These two tracks are different in terms of characteristics, requirements, and aspects of emphasis. In general, generation of patterns is commonly achieved in a serial fashion using techniques that are typically slow, making this process only practical for making a small number of copies. Only when combined with a rapid duplication technique will fabrication at high-throughput and low-cost become feasible. Nanoskiving is unique in that it can be used for both generation and duplication of patterned nanostructures.

Full Text

Duke Authors

Cited Authors

  • Wiley, BJ; Qin, D; Xia, Y

Published Date

  • July 27, 2010

Published In

Volume / Issue

  • 4 / 7

Start / End Page

  • 3554 - 3559

PubMed ID

  • 20695512

Electronic International Standard Serial Number (EISSN)

  • 1936-086X

Digital Object Identifier (DOI)

  • 10.1021/nn101472p

Language

  • eng