Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator


Conference Paper

© 2002 IEEE. This paper describes the development of a new type of optical coherence tomography (OCT) probe using an electrostatic micromachine (MEMS) actuator. These devices consist of millimeter scale mirrors resting on micron scale polyimide hinges that are tilted using a linear MEMS actuator, the integrated force array (IFA). The IFA is a parallel network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated from polyimide on silicon wafers using photolithography. These scanners were designed, fabricated and tested for optical displacements at different frequencies and drive voltages. They were then used in the scanning arm of an experimental OCT imaging system to make preliminary images.

Full Text

Duke Authors

Cited Authors

  • Zara, JM; Izatt, JA; Rao, KD; Yazdanfar, S; Smith, SW

Published Date

  • January 1, 2002

Published In

Volume / Issue

  • 2002-January /

Start / End Page

  • 297 - 300

Electronic International Standard Serial Number (EISSN)

  • 1945-8452

International Standard Serial Number (ISSN)

  • 1945-7928

International Standard Book Number 10 (ISBN-10)

  • 078037584X

Digital Object Identifier (DOI)

  • 10.1109/ISBI.2002.1029252

Citation Source

  • Scopus