CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES
Publication
, Journal Article
SUBRAHMANYAN, R; MASSOUD, HZ; FAIR, RB
Published in: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
March 1, 1987
Duke Scholars
Published In
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
ISSN
0013-4651
Publication Date
March 1, 1987
Volume
134
Issue
3
Start / End Page
C124 / C125
Publisher
ELECTROCHEMICAL SOC INC
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry
Citation
APA
Chicago
ICMJE
MLA
NLM
SUBRAHMANYAN, R., MASSOUD, H. Z., & FAIR, R. B. (1987). CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 134(3), C124–C125.
SUBRAHMANYAN, R., H. Z. MASSOUD, and R. B. FAIR. “CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY 134, no. 3 (March 1, 1987): C124–25.
SUBRAHMANYAN R, MASSOUD HZ, FAIR RB. CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 1987 Mar 1;134(3):C124–5.
SUBRAHMANYAN, R., et al. “CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 134, no. 3, ELECTROCHEMICAL SOC INC, Mar. 1987, pp. C124–25.
SUBRAHMANYAN R, MASSOUD HZ, FAIR RB. CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. ELECTROCHEMICAL SOC INC; 1987 Mar 1;134(3):C124–C125.
Published In
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
ISSN
0013-4651
Publication Date
March 1, 1987
Volume
134
Issue
3
Start / End Page
C124 / C125
Publisher
ELECTROCHEMICAL SOC INC
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry