CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES
Journal Article (Journal)
Full Text
Duke Authors
Cited Authors
- SUBRAHMANYAN, R; MASSOUD, HZ; FAIR, RB
Published Date
- March 1, 1987
Published In
Volume / Issue
- 134 / 3
Start / End Page
- C124 - C125
Published By
Pages
- 2
International Standard Serial Number (ISSN)
- 0013-4651
Language
- English