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POINT-DEFECT KINETICS DURING BACK SIDE OXIDATION MEASURED BY FRONT SIDE STACKING-FAULT GROWTH

Publication ,  Journal Article
ROGERS, B; MASSOUD, HZ; FAIR, RB; GOSELE, UM; SHAW, R; KORB, H; GUSE, M
Published in: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
March 1, 1987
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Duke Scholars

Hisham Z. Massoud
Author Hisham Z. Massoud Electrical and Computer Engineering
Richard B. Fair
Author Richard B. Fair Electrical and Computer Engineering

Published In

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

ISSN

0013-4651

Publication Date

March 1, 1987

Volume

134

Issue

3

Start / End Page

C125 / C125

Publisher

ELECTROCHEMICAL SOC INC

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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ROGERS, B., MASSOUD, H. Z., FAIR, R. B., GOSELE, U. M., SHAW, R., KORB, H., & GUSE, M. (1987). POINT-DEFECT KINETICS DURING BACK SIDE OXIDATION MEASURED BY FRONT SIDE STACKING-FAULT GROWTH. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 134(3), C125–C125.
ROGERS, B., H. Z. MASSOUD, R. B. FAIR, U. M. GOSELE, R. SHAW, H. KORB, and M. GUSE. “POINT-DEFECT KINETICS DURING BACK SIDE OXIDATION MEASURED BY FRONT SIDE STACKING-FAULT GROWTH.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY 134, no. 3 (March 1, 1987): C125–C125.
ROGERS B, MASSOUD HZ, FAIR RB, GOSELE UM, SHAW R, KORB H, et al. POINT-DEFECT KINETICS DURING BACK SIDE OXIDATION MEASURED BY FRONT SIDE STACKING-FAULT GROWTH. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 1987 Mar 1;134(3):C125–C125.
ROGERS, B., et al. “POINT-DEFECT KINETICS DURING BACK SIDE OXIDATION MEASURED BY FRONT SIDE STACKING-FAULT GROWTH.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 134, no. 3, ELECTROCHEMICAL SOC INC, Mar. 1987, pp. C125–C125.
ROGERS B, MASSOUD HZ, FAIR RB, GOSELE UM, SHAW R, KORB H, GUSE M. POINT-DEFECT KINETICS DURING BACK SIDE OXIDATION MEASURED BY FRONT SIDE STACKING-FAULT GROWTH. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. ELECTROCHEMICAL SOC INC; 1987 Mar 1;134(3):C125–C125.

Published In

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

ISSN

0013-4651

Publication Date

March 1, 1987

Volume

134

Issue

3

Start / End Page

C125 / C125

Publisher

ELECTROCHEMICAL SOC INC

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry