A vacuum system for the production of clean carbon films


Journal Article

A compact, oil‐free vacuum system has been assembled for the production of thin carbon films. Carbon rods are held in a simply constructed and easily cleaned rod holder. Using an unlubricated mechanical roughing pump and one sorption pump, the system is evacuated to the low millitorr range while completely avoiding oil vapors and contaminants that might derive from pump oil. Films produced in such systems are hydrophilic, and analytical electron microscopy measurements have shown that these films are adequately smooth and free of contaminants of both high and low atomic number. Copyright © 1987 Wiley‐Liss, Inc.

Full Text

Duke Authors

Cited Authors

  • Lamvik, MK; Voreades, D; Norton, P; LeFurgey, A; Ingram, P

Published Date

  • January 1, 1987

Published In

Volume / Issue

  • 5 / 2

Start / End Page

  • 153 - 157

Electronic International Standard Serial Number (EISSN)

  • 1553-0817

International Standard Serial Number (ISSN)

  • 0741-0581

Digital Object Identifier (DOI)

  • 10.1002/jemt.1060050205

Citation Source

  • Scopus