Circuit-based SEM contour OPC model calibration

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Patterson, K; Vasek, J; Yuan, CM; Bailey, GE; Kusnadi, I; Do, T; Sturtevant, JL

Published Date

  • March 16, 2007

Published In

  • Design for Manufacturability Through Design Process Integration

Published By

Digital Object Identifier (DOI)

  • 10.1117/12.713044