Circuit-based SEM contour OPC model calibration
Published
Journal Article
Full Text
Duke Authors
Cited Authors
- Patterson, K; Vasek, J; Yuan, CM; Bailey, GE; Kusnadi, I; Do, T; Sturtevant, JL
Published Date
- March 16, 2007
Published In
- Design for Manufacturability Through Design Process Integration
Published By
Digital Object Identifier (DOI)
- 10.1117/12.713044