DEPOSITION AND PROPERTIES OF SIO2 - INTRODUCTION
Conference Paper
Full Text
Duke Authors
Cited Authors
- MASSOUD, HZ; RAIDER, SI
Cited Editors
- Helms, CR; Deal, BE
Published Date
- January 1, 1993
Published In
- Physics and Chemistry of Sio2 and the Si Si0 2 Interface 2
Start / End Page
- 117 - 118
Published By
Pages
- 2
International Standard Book Number 10 (ISBN-10)
- 0-306-44419-4
Conference Name
- 2nd Symposium on the Physics and Chemistry of the SIO-2 and SI-SIO-2 Interface, at the 181st Meeting of the Electrochemical-Society
Conference Location
- ST LOUIS, MO
Conference Start Date
- May 18, 1992
Conference End Date
- May 22, 1992