DEPOSITION AND PROPERTIES OF SIO2 - INTRODUCTION

Conference Paper

Full Text

Duke Authors

Cited Authors

  • MASSOUD, HZ; RAIDER, SI

Cited Editors

  • Helms, CR; Deal, BE

Published Date

  • January 1, 1993

Published In

  • Physics and Chemistry of Sio2 and the Si Si0 2 Interface 2

Start / End Page

  • 117 - 118

Published By

Pages

  • 2

International Standard Book Number 10 (ISBN-10)

  • 0-306-44419-4

Conference Name

  • 2nd Symposium on the Physics and Chemistry of the SIO-2 and SI-SIO-2 Interface, at the 181st Meeting of the Electrochemical-Society

Conference Location

  • ST LOUIS, MO

Conference Start Date

  • May 18, 1992

Conference End Date

  • May 22, 1992