Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control

Published

Conference Paper

Full Text

Duke Authors

Cited Authors

  • Massoud, HZ; Sampson, RK; Conrad, KA; Hu, Y-Z; Irene, EA

Published Date

  • January 1, 1991

Published In

Volume / Issue

  • 224 /

Published By

Electronic International Standard Serial Number (EISSN)

  • 1946-4274

Digital Object Identifier (DOI)

  • 10.1557/proc-224-17