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Duke Authors

• Massoud, Hisham Z.

Cited Authors

• Massoud, HZ

Cited Editors

• Deen, MJ; Brown, WD; Sundaram, KB; Raider, SI

Published Date

• January 1, 1997

Published In

• Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Volume / Issue

• 97 / 10

Start / End Page

• 208 - 216

Published By

• ELECTROCHEMICAL SOCIETY INC 

Pages

• 9

International Standard Book Number 10 (ISBN-10)

• 1-56677-137-4

Conference Name

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Conference Location

• MONTREAL, CANADA

Conference Start Date

• May 4, 1997

Conference End Date

• May 9, 1997