C-V MEASUREMENT AND SIMULATION OF SILICON-INSULATOR-SILICON (SIS) STRUCTURES FOR ANALYZING CHARGES IN BURIED OXIDES OF BONDED SOI MATERIALS
Journal Article (Academic article)
Full Text
Duke Authors
Cited Authors
- MITANI, K; MASSOUD, HZ
Published Date
- 1992
Published In
Volume / Issue
- E75C / 12
Start / End Page
- 1421 - 1429
Electronic International Standard Serial Number (EISSN)
- 1745-1353
International Standard Serial Number (ISSN)
- 0916-8524