C-V MEASUREMENT AND SIMULATION OF SILICON-INSULATOR-SILICON (SIS) STRUCTURES FOR ANALYZING CHARGES IN BURIED OXIDES OF BONDED SOI MATERIALS

Journal Article (Academic article)

Full Text

Duke Authors

Cited Authors

  • MITANI, K; MASSOUD, HZ

Published Date

  • 1992

Published In

Volume / Issue

  • E75C / 12

Start / End Page

  • 1421 - 1429

Electronic International Standard Serial Number (EISSN)

  • 1745-1353

International Standard Serial Number (ISSN)

  • 0916-8524