Scholars@Duke

Deep Ion Etcher for SMIF

Research Grant
Duke Scholars
Chuan-Hua Chen
Co-Principal Investigator Chuan-Hua Chen Thomas Lord Department of Mechanical Engineering and Materia ...
Jungsang Kim
Principal Investigator Jungsang Kim Electrical and Computer Engineering
Nan Marie Jokerst
Co-Principal Investigator Nan Marie Jokerst Electrical and Computer Engineering
Mark Walters
Co-Principal Investigator Mark Walters  

Administered By

Electrical and Computer Engineering

Awarded By

National Science Foundation

Start Date

March 15, 2010

End Date

February 28, 2011
 

Administered By

Electrical and Computer Engineering

Awarded By

National Science Foundation

Start Date

March 15, 2010

End Date

February 28, 2011