Scholars@Duke

Deep Ion Etcher for SMIF

Research Grant
Duke Scholars
Chuan-Hua Chen
Co-Principal Investigator Chuan-Hua Chen Thomas Lord Department of Mechanical Engineering and Materia ...
Nan Marie Jokerst
Co-Principal Investigator Nan Marie Jokerst Pierre R. Lamond Department of Electrical and Computer Engin ...
Jungsang Kim
Principal Investigator Jungsang Kim Pierre R. Lamond Department of Electrical and Computer Engin ...

Administered By

Pierre R. Lamond Department of Electrical and Computer Engineering

Awarded By

National Science Foundation

Start Date

March 15, 2010

End Date

February 28, 2011
 

Administered By

Pierre R. Lamond Department of Electrical and Computer Engineering

Awarded By

National Science Foundation

Start Date

March 15, 2010

End Date

February 28, 2011