Flexible, large-area metamaterials fabricated on thin silicon nitride membranes
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, Journal Article
Peralta, XG; Arrington, CL; Wanke, MC; Brener, I; Williams, JD; Smirnova, E; Taylor, AJ; O'Hara, JF; Strikwerda, A; Averitt, RD; Padilla, WJ
Published in: 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
September 15, 2008
We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs. © 2008 Optical Society of America.
Duke Scholars
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2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
DOI
Publication Date
September 15, 2008
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Peralta, X. G., Arrington, C. L., Wanke, M. C., Brener, I., Williams, J. D., Smirnova, E., … Padilla, W. J. (2008). Flexible, large-area metamaterials fabricated on thin silicon nitride membranes. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. https://doi.org/10.1109/CLEO.2008.4551092
Peralta, X. G., C. L. Arrington, M. C. Wanke, I. Brener, J. D. Williams, E. Smirnova, A. J. Taylor, et al. “Flexible, large-area metamaterials fabricated on thin silicon nitride membranes.” 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS, September 15, 2008. https://doi.org/10.1109/CLEO.2008.4551092.
Peralta XG, Arrington CL, Wanke MC, Brener I, Williams JD, Smirnova E, et al. Flexible, large-area metamaterials fabricated on thin silicon nitride membranes. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008 Sep 15;
Peralta, X. G., et al. “Flexible, large-area metamaterials fabricated on thin silicon nitride membranes.” 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS, Sept. 2008. Scopus, doi:10.1109/CLEO.2008.4551092.
Peralta XG, Arrington CL, Wanke MC, Brener I, Williams JD, Smirnova E, Taylor AJ, O’Hara JF, Strikwerda A, Averitt RD, Padilla WJ. Flexible, large-area metamaterials fabricated on thin silicon nitride membranes. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008 Sep 15;
Published In
2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
DOI
Publication Date
September 15, 2008