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A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)

Publication ,  Journal Article
Radauscher, EJ; Parker, CB; Gilchrist, KH; Di Dona, S; Russell, ZE; Hall, SD; Carlson, JB; Grego, S; Edwards, SJ; Sperline, RP; Denton, MB ...
Published in: International Journal of Mass Spectrometry
November 1, 2017

The use of microelectromechanical systems (MEMS) components in miniature mass spectrometers is particularly attractive due to their small size and scalable manufacturing capability. Our group has pioneered the development of miniature electron ionization sources combining MEMS fabricated structures with integrated carbon nanotube (CNT) cold-cathode field emitters. However, until now they have been of limited use due to the limited ability to direct the ions into a mass analyzer. In this work, we design a miniature ion source using a microfabricated MEMS device and a low temperature co-fired ceramic (LTCC) carrier that includes electrical connections, ion optics for directing ions out of the device, and a sample inlet. We present the design and fabrication of the ion source; simulate the energy and angular dispersion; and experimentally determine the energy and angular dispersion.

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Published In

International Journal of Mass Spectrometry

DOI

ISSN

1387-3806

Publication Date

November 1, 2017

Volume

422

Start / End Page

162 / 169

Related Subject Headings

  • Analytical Chemistry
  • 5102 Atomic, molecular and optical physics
  • 3406 Physical chemistry
  • 3401 Analytical chemistry
  • 0306 Physical Chemistry (incl. Structural)
  • 0305 Organic Chemistry
  • 0301 Analytical Chemistry
 

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Radauscher, E. J., Parker, C. B., Gilchrist, K. H., Di Dona, S., Russell, Z. E., Hall, S. D., … Amsden, J. J. (2017). A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC). International Journal of Mass Spectrometry, 422, 162–169. https://doi.org/10.1016/j.ijms.2016.10.021
Radauscher, E. J., C. B. Parker, K. H. Gilchrist, S. Di Dona, Z. E. Russell, S. D. Hall, J. B. Carlson, et al. “A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC).” International Journal of Mass Spectrometry 422 (November 1, 2017): 162–69. https://doi.org/10.1016/j.ijms.2016.10.021.
Radauscher EJ, Parker CB, Gilchrist KH, Di Dona S, Russell ZE, Hall SD, et al. A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC). International Journal of Mass Spectrometry. 2017 Nov 1;422:162–9.
Radauscher, E. J., et al. “A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC).” International Journal of Mass Spectrometry, vol. 422, Nov. 2017, pp. 162–69. Scopus, doi:10.1016/j.ijms.2016.10.021.
Radauscher EJ, Parker CB, Gilchrist KH, Di Dona S, Russell ZE, Hall SD, Carlson JB, Grego S, Edwards SJ, Sperline RP, Denton MB, Stoner BR, Glass JT, Amsden JJ. A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC). International Journal of Mass Spectrometry. 2017 Nov 1;422:162–169.
Journal cover image

Published In

International Journal of Mass Spectrometry

DOI

ISSN

1387-3806

Publication Date

November 1, 2017

Volume

422

Start / End Page

162 / 169

Related Subject Headings

  • Analytical Chemistry
  • 5102 Atomic, molecular and optical physics
  • 3406 Physical chemistry
  • 3401 Analytical chemistry
  • 0306 Physical Chemistry (incl. Structural)
  • 0305 Organic Chemistry
  • 0301 Analytical Chemistry