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Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect

Publication ,  Conference
Gasparyan, A; Shea, H; Arney, S; Aksyuk, V; Simon, ME; Pardo, F; Chan, HB; Kim, J; Gates, J; Kraus, JS; Goyal, S; Carr, D; Kleiman, R
Published in: Conference on Optical Fiber Communication, Technical Digest Series
January 1, 2003

We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000 G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss nonblocking 1000x1000-port optical cross-connect switch.

Duke Scholars

Published In

Conference on Optical Fiber Communication, Technical Digest Series

DOI

ISBN

1557527466

Publication Date

January 1, 2003

Volume

2003-January

Start / End Page

PD36.1 / PD36.3
 

Citation

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Gasparyan, A., Shea, H., Arney, S., Aksyuk, V., Simon, M. E., Pardo, F., … Kleiman, R. (2003). Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect. In Conference on Optical Fiber Communication, Technical Digest Series (Vol. 2003-January, p. PD36.1-PD36.3). https://doi.org/10.1109/OFC.2003.316014
Gasparyan, A., H. Shea, S. Arney, V. Aksyuk, M. E. Simon, F. Pardo, H. B. Chan, et al. “Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect.” In Conference on Optical Fiber Communication, Technical Digest Series, 2003-January:PD36.1-PD36.3, 2003. https://doi.org/10.1109/OFC.2003.316014.
Gasparyan A, Shea H, Arney S, Aksyuk V, Simon ME, Pardo F, et al. Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect. In: Conference on Optical Fiber Communication, Technical Digest Series. 2003. p. PD36.1-PD36.3.
Gasparyan, A., et al. “Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect.” Conference on Optical Fiber Communication, Technical Digest Series, vol. 2003-January, 2003, p. PD36.1-PD36.3. Scopus, doi:10.1109/OFC.2003.316014.
Gasparyan A, Shea H, Arney S, Aksyuk V, Simon ME, Pardo F, Chan HB, Kim J, Gates J, Kraus JS, Goyal S, Carr D, Kleiman R. Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect. Conference on Optical Fiber Communication, Technical Digest Series. 2003. p. PD36.1-PD36.3.

Published In

Conference on Optical Fiber Communication, Technical Digest Series

DOI

ISBN

1557527466

Publication Date

January 1, 2003

Volume

2003-January

Start / End Page

PD36.1 / PD36.3