Comparison of external and internal planar radio frequency antennae for inductively coupled plasma
Publication
, Journal Article
Eng, K; Strohmaier, K; Palmer, R; Stoner, B; Washburn, S
Published in: Review of Scientific Instruments
January 1, 1997
Radio frequency (rf) antennae, coated with glass, were inductively coupled to an Ar plasma inside the processing chamber. Coupling efficiency η and electron density Ne were measured for moderate pressures (0.1-200 T) and rf power (10-2000 W). Decreasing the dielectric thickness between the antenna and the Ar led to an increase in η and a decrease in Ne. Instabilities and hysteresis were observed for the internal antennae. © 1997 American Institute of Physics.
Duke Scholars
Published In
Review of Scientific Instruments
DOI
ISSN
0034-6748
Publication Date
January 1, 1997
Volume
68
Issue
6
Start / End Page
2381 / 2383
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 34 Chemical sciences
- 09 Engineering
- 03 Chemical Sciences
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Eng, K., Strohmaier, K., Palmer, R., Stoner, B., & Washburn, S. (1997). Comparison of external and internal planar radio frequency antennae for inductively coupled plasma. Review of Scientific Instruments, 68(6), 2381–2383. https://doi.org/10.1063/1.1148121
Eng, K., K. Strohmaier, R. Palmer, B. Stoner, and S. Washburn. “Comparison of external and internal planar radio frequency antennae for inductively coupled plasma.” Review of Scientific Instruments 68, no. 6 (January 1, 1997): 2381–83. https://doi.org/10.1063/1.1148121.
Eng K, Strohmaier K, Palmer R, Stoner B, Washburn S. Comparison of external and internal planar radio frequency antennae for inductively coupled plasma. Review of Scientific Instruments. 1997 Jan 1;68(6):2381–3.
Eng, K., et al. “Comparison of external and internal planar radio frequency antennae for inductively coupled plasma.” Review of Scientific Instruments, vol. 68, no. 6, Jan. 1997, pp. 2381–83. Scopus, doi:10.1063/1.1148121.
Eng K, Strohmaier K, Palmer R, Stoner B, Washburn S. Comparison of external and internal planar radio frequency antennae for inductively coupled plasma. Review of Scientific Instruments. 1997 Jan 1;68(6):2381–2383.
Published In
Review of Scientific Instruments
DOI
ISSN
0034-6748
Publication Date
January 1, 1997
Volume
68
Issue
6
Start / End Page
2381 / 2383
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 34 Chemical sciences
- 09 Engineering
- 03 Chemical Sciences
- 02 Physical Sciences