Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films
Publication
, Journal Article
Ruddell, DE; Stoner, BR; Thompson, JY
Published in: Journal of Materials Research
January 1, 2003
Transmission electron microscopy (TEM) was used to investigate the structural properties of sputter-deposited yttria-stabilized zirconia (YSZ) thin films. YSZ films were deposited over a range of temperatures and background oxygen levels. Additionally, a multilayered structure was produced by cyclic application of a substrate bias. Plan-view TEM showed that temperature and oxygen levels did not have a significant effect on grain size but did alter the phases present in the thin films. Cross-sectional TEM showed the development of texture in the multilayer film, both within the individual layers and in the entire film.
Duke Scholars
Published In
Journal of Materials Research
DOI
ISSN
0884-2914
Publication Date
January 1, 2003
Volume
18
Issue
1
Start / End Page
195 / 200
Related Subject Headings
- Materials
- 5104 Condensed matter physics
- 4017 Mechanical engineering
- 4016 Materials engineering
- 0913 Mechanical Engineering
- 0912 Materials Engineering
- 0204 Condensed Matter Physics
Citation
APA
Chicago
ICMJE
MLA
NLM
Ruddell, D. E., Stoner, B. R., & Thompson, J. Y. (2003). Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films. Journal of Materials Research, 18(1), 195–200. https://doi.org/10.1557/JMR.2003.0027
Ruddell, D. E., B. R. Stoner, and J. Y. Thompson. “Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films.” Journal of Materials Research 18, no. 1 (January 1, 2003): 195–200. https://doi.org/10.1557/JMR.2003.0027.
Ruddell DE, Stoner BR, Thompson JY. Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films. Journal of Materials Research. 2003 Jan 1;18(1):195–200.
Ruddell, D. E., et al. “Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films.” Journal of Materials Research, vol. 18, no. 1, Jan. 2003, pp. 195–200. Scopus, doi:10.1557/JMR.2003.0027.
Ruddell DE, Stoner BR, Thompson JY. Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films. Journal of Materials Research. 2003 Jan 1;18(1):195–200.
Published In
Journal of Materials Research
DOI
ISSN
0884-2914
Publication Date
January 1, 2003
Volume
18
Issue
1
Start / End Page
195 / 200
Related Subject Headings
- Materials
- 5104 Condensed matter physics
- 4017 Mechanical engineering
- 4016 Materials engineering
- 0913 Mechanical Engineering
- 0912 Materials Engineering
- 0204 Condensed Matter Physics