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Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films

Publication ,  Journal Article
Ruddell, DE; Stoner, BR; Thompson, JY
Published in: Journal of Materials Research
January 1, 2003

Transmission electron microscopy (TEM) was used to investigate the structural properties of sputter-deposited yttria-stabilized zirconia (YSZ) thin films. YSZ films were deposited over a range of temperatures and background oxygen levels. Additionally, a multilayered structure was produced by cyclic application of a substrate bias. Plan-view TEM showed that temperature and oxygen levels did not have a significant effect on grain size but did alter the phases present in the thin films. Cross-sectional TEM showed the development of texture in the multilayer film, both within the individual layers and in the entire film.

Duke Scholars

Published In

Journal of Materials Research

DOI

ISSN

0884-2914

Publication Date

January 1, 2003

Volume

18

Issue

1

Start / End Page

195 / 200

Related Subject Headings

  • Materials
  • 5104 Condensed matter physics
  • 4017 Mechanical engineering
  • 4016 Materials engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics
 

Citation

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ICMJE
MLA
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Ruddell, D. E., Stoner, B. R., & Thompson, J. Y. (2003). Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films. Journal of Materials Research, 18(1), 195–200. https://doi.org/10.1557/JMR.2003.0027
Ruddell, D. E., B. R. Stoner, and J. Y. Thompson. “Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films.” Journal of Materials Research 18, no. 1 (January 1, 2003): 195–200. https://doi.org/10.1557/JMR.2003.0027.
Ruddell DE, Stoner BR, Thompson JY. Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films. Journal of Materials Research. 2003 Jan 1;18(1):195–200.
Ruddell, D. E., et al. “Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films.” Journal of Materials Research, vol. 18, no. 1, Jan. 2003, pp. 195–200. Scopus, doi:10.1557/JMR.2003.0027.
Ruddell DE, Stoner BR, Thompson JY. Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films. Journal of Materials Research. 2003 Jan 1;18(1):195–200.
Journal cover image

Published In

Journal of Materials Research

DOI

ISSN

0884-2914

Publication Date

January 1, 2003

Volume

18

Issue

1

Start / End Page

195 / 200

Related Subject Headings

  • Materials
  • 5104 Condensed matter physics
  • 4017 Mechanical engineering
  • 4016 Materials engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics