Wafer bonding of diamond films to silicon for silicon-on-insulator technology
Publication
, Journal Article
Yushin, GN; Wolter, SD; Kvit, AV; Collazo, R; Prater, JT; Stoner, BR; Sitar, Z
Published in: Materials Research Society Symposium - Proceedings
January 1, 2002
Polycrystalline diamond films previously grown on silicon were polished to an RMS roughness of 15 nm and bonded to the silicon in a dedicated ultrahigh vacuum bonding chamber. Successful bonding under a uniaxial mechanical stress of 32 MPa was observed at temperatures as tow as 950°C. Scanning acoustic microscopy indicated complete bonding at fusion temperatures above 1150°C. Cross-sectional transmission electron microcopy later revealed a 30 nm thick intermediate amorphous layer consisting of silicon, carbon and oxygen.
Duke Scholars
Published In
Materials Research Society Symposium - Proceedings
ISSN
0272-9172
Publication Date
January 1, 2002
Volume
686
Start / End Page
69 / 74
Citation
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NLM
Yushin, G. N., Wolter, S. D., Kvit, A. V., Collazo, R., Prater, J. T., Stoner, B. R., & Sitar, Z. (2002). Wafer bonding of diamond films to silicon for silicon-on-insulator technology. Materials Research Society Symposium - Proceedings, 686, 69–74.
Yushin, G. N., S. D. Wolter, A. V. Kvit, R. Collazo, J. T. Prater, B. R. Stoner, and Z. Sitar. “Wafer bonding of diamond films to silicon for silicon-on-insulator technology.” Materials Research Society Symposium - Proceedings 686 (January 1, 2002): 69–74.
Yushin GN, Wolter SD, Kvit AV, Collazo R, Prater JT, Stoner BR, et al. Wafer bonding of diamond films to silicon for silicon-on-insulator technology. Materials Research Society Symposium - Proceedings. 2002 Jan 1;686:69–74.
Yushin, G. N., et al. “Wafer bonding of diamond films to silicon for silicon-on-insulator technology.” Materials Research Society Symposium - Proceedings, vol. 686, Jan. 2002, pp. 69–74.
Yushin GN, Wolter SD, Kvit AV, Collazo R, Prater JT, Stoner BR, Sitar Z. Wafer bonding of diamond films to silicon for silicon-on-insulator technology. Materials Research Society Symposium - Proceedings. 2002 Jan 1;686:69–74.
Published In
Materials Research Society Symposium - Proceedings
ISSN
0272-9172
Publication Date
January 1, 2002
Volume
686
Start / End Page
69 / 74