Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia films
Publication
, Journal Article
Piascik, JR; Thompson, JY; Bower, CA; Stoner, BR
Published in: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
July 1, 2006
An increase in compressive stress was observed in rf magnetron sputtered yttria-stabilized zirconia thin films upon exposure to ambient conditions (25°C and 75% relative humidity). This increase was attributed to absorption of water molecules into intergranular pores. It was shown that increasing substrate bias power disrupted columnar grain growth and reduced the percent change in compressive stress when exposed to ambient environments. Transmission electron microscopy confirmed a reduction in intergranular porosity for substrate bias depositions but an increase in lateral defects. These defects are hypothesized to be stress-induced microcracks caused by a tetragonal to monoclinic phase transformation. © 2006 American Vacuum Society.
Duke Scholars
Published In
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
DOI
ISSN
0734-2101
Publication Date
July 1, 2006
Volume
24
Issue
4
Start / End Page
1091 / 1095
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Piascik, J. R., Thompson, J. Y., Bower, C. A., & Stoner, B. R. (2006). Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia films. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 24(4), 1091–1095. https://doi.org/10.1116/1.2210949
Piascik, J. R., J. Y. Thompson, C. A. Bower, and B. R. Stoner. “Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia films.” Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 24, no. 4 (July 1, 2006): 1091–95. https://doi.org/10.1116/1.2210949.
Piascik JR, Thompson JY, Bower CA, Stoner BR. Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia films. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2006 Jul 1;24(4):1091–5.
Piascik, J. R., et al. “Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia films.” Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 24, no. 4, July 2006, pp. 1091–95. Scopus, doi:10.1116/1.2210949.
Piascik JR, Thompson JY, Bower CA, Stoner BR. Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia films. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2006 Jul 1;24(4):1091–1095.
Published In
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
DOI
ISSN
0734-2101
Publication Date
July 1, 2006
Volume
24
Issue
4
Start / End Page
1091 / 1095
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences