Copper metallization of polyimide film by excimer laser irradiation and electrodeposition
Publication
, Conference
Hohman, JL; Keating, KB; Kelley, MJ
Published in: Materials Research Society Symposium - Proceedings
December 1, 1995
Severe excimer laser irradiation is reported to impart electrical conductivity to Kapton* polymide films. We find that a proper choice of pretreatment and irradiation practice reduces the required dose markedly. Such films have sufficient conductivity to permit direct, good-quality, adherent copper electroplating.
Published In
Materials Research Society Symposium - Proceedings
ISSN
0272-9172
Publication Date
December 1, 1995
Volume
354
Start / End Page
571 / 577
Citation
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Hohman, J. L., Keating, K. B., & Kelley, M. J. (1995). Copper metallization of polyimide film by excimer laser irradiation and electrodeposition. In Materials Research Society Symposium - Proceedings (Vol. 354, pp. 571–577).
Hohman, J. L., K. B. Keating, and M. J. Kelley. “Copper metallization of polyimide film by excimer laser irradiation and electrodeposition.” In Materials Research Society Symposium - Proceedings, 354:571–77, 1995.
Hohman JL, Keating KB, Kelley MJ. Copper metallization of polyimide film by excimer laser irradiation and electrodeposition. In: Materials Research Society Symposium - Proceedings. 1995. p. 571–7.
Hohman, J. L., et al. “Copper metallization of polyimide film by excimer laser irradiation and electrodeposition.” Materials Research Society Symposium - Proceedings, vol. 354, 1995, pp. 571–77.
Hohman JL, Keating KB, Kelley MJ. Copper metallization of polyimide film by excimer laser irradiation and electrodeposition. Materials Research Society Symposium - Proceedings. 1995. p. 571–577.
Published In
Materials Research Society Symposium - Proceedings
ISSN
0272-9172
Publication Date
December 1, 1995
Volume
354
Start / End Page
571 / 577