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MEMS and metamaterials: A perfect marriage at terahertz frequencies

Publication ,  Conference
Tao, H; Bingham, C; Strikwerda, A; Fan, K; Padilla, WJ; Averitt, RD; Zhang, X
Published in: Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
January 1, 2008

This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies. We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials. Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.

Duke Scholars

Published In

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

DOI

ISBN

9780964002470

Publication Date

January 1, 2008

Start / End Page

54 / 55
 

Citation

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Tao, H., Bingham, C., Strikwerda, A., Fan, K., Padilla, W. J., Averitt, R. D., & Zhang, X. (2008). MEMS and metamaterials: A perfect marriage at terahertz frequencies. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 54–55). https://doi.org/10.31438/trf.hh2008.15
Tao, H., C. Bingham, A. Strikwerda, K. Fan, W. J. Padilla, R. D. Averitt, and X. Zhang. “MEMS and metamaterials: A perfect marriage at terahertz frequencies.” In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, 54–55, 2008. https://doi.org/10.31438/trf.hh2008.15.
Tao H, Bingham C, Strikwerda A, Fan K, Padilla WJ, Averitt RD, et al. MEMS and metamaterials: A perfect marriage at terahertz frequencies. In: Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 2008. p. 54–5.
Tao, H., et al. “MEMS and metamaterials: A perfect marriage at terahertz frequencies.” Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, 2008, pp. 54–55. Scopus, doi:10.31438/trf.hh2008.15.
Tao H, Bingham C, Strikwerda A, Fan K, Padilla WJ, Averitt RD, Zhang X. MEMS and metamaterials: A perfect marriage at terahertz frequencies. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 2008. p. 54–55.

Published In

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

DOI

ISBN

9780964002470

Publication Date

January 1, 2008

Start / End Page

54 / 55