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MEMS and metamaterials: A perfect marriage at terahertz frequencies

Publication ,  Conference
Tao, H; Bingham, C; Strikwerda, A; Fan, K; Padilla, WJ; Averitt, RD; Zhang, X
Published in: Technical Digest Solid State Sensors Actuators and Microsystems Workshop
January 1, 2008

This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies. We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials. Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.

Duke Scholars

Published In

Technical Digest Solid State Sensors Actuators and Microsystems Workshop

DOI

Publication Date

January 1, 2008

Start / End Page

54 / 55
 

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Tao, H., Bingham, C., Strikwerda, A., Fan, K., Padilla, W. J., Averitt, R. D., & Zhang, X. (2008). MEMS and metamaterials: A perfect marriage at terahertz frequencies. In Technical Digest Solid State Sensors Actuators and Microsystems Workshop (pp. 54–55). https://doi.org/10.31438/trf.hh2008.15
Tao, H., C. Bingham, A. Strikwerda, K. Fan, W. J. Padilla, R. D. Averitt, and X. Zhang. “MEMS and metamaterials: A perfect marriage at terahertz frequencies.” In Technical Digest Solid State Sensors Actuators and Microsystems Workshop, 54–55, 2008. https://doi.org/10.31438/trf.hh2008.15.
Tao H, Bingham C, Strikwerda A, Fan K, Padilla WJ, Averitt RD, et al. MEMS and metamaterials: A perfect marriage at terahertz frequencies. In: Technical Digest Solid State Sensors Actuators and Microsystems Workshop. 2008. p. 54–5.
Tao, H., et al. “MEMS and metamaterials: A perfect marriage at terahertz frequencies.” Technical Digest Solid State Sensors Actuators and Microsystems Workshop, 2008, pp. 54–55. Scopus, doi:10.31438/trf.hh2008.15.
Tao H, Bingham C, Strikwerda A, Fan K, Padilla WJ, Averitt RD, Zhang X. MEMS and metamaterials: A perfect marriage at terahertz frequencies. Technical Digest Solid State Sensors Actuators and Microsystems Workshop. 2008. p. 54–55.

Published In

Technical Digest Solid State Sensors Actuators and Microsystems Workshop

DOI

Publication Date

January 1, 2008

Start / End Page

54 / 55