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Plano-eucentric photometry system for micro-display metrology

Publication ,  Conference
Lamvik, M; Grego, S
Published in: Digest of Technical Papers - SID International Symposium
December 1, 2005

We describe a unique micro-display metrology system in which the stage can be rotated arbitrarily and the area of interest does not leave the field of view. Similarly, the sample can be tilted up to 60 degrees and the area of interest stays continuously in focus. The mechanism operates instantaneously and does not depend on computers or motors to achieve correct centering. This capability facilitates the rapid measurement of micro-display characteristics over a wide range of angles. © 2005 SID.

Duke Scholars

Published In

Digest of Technical Papers - SID International Symposium

DOI

ISSN

0097-966X

Publication Date

December 1, 2005

Volume

36

Issue

1

Start / End Page

542 / 545
 

Citation

APA
Chicago
ICMJE
MLA
NLM
Lamvik, M., & Grego, S. (2005). Plano-eucentric photometry system for micro-display metrology. In Digest of Technical Papers - SID International Symposium (Vol. 36, pp. 542–545). https://doi.org/10.1889/1.2036495
Lamvik, M., and S. Grego. “Plano-eucentric photometry system for micro-display metrology.” In Digest of Technical Papers - SID International Symposium, 36:542–45, 2005. https://doi.org/10.1889/1.2036495.
Lamvik M, Grego S. Plano-eucentric photometry system for micro-display metrology. In: Digest of Technical Papers - SID International Symposium. 2005. p. 542–5.
Lamvik, M., and S. Grego. “Plano-eucentric photometry system for micro-display metrology.” Digest of Technical Papers - SID International Symposium, vol. 36, no. 1, 2005, pp. 542–45. Scopus, doi:10.1889/1.2036495.
Lamvik M, Grego S. Plano-eucentric photometry system for micro-display metrology. Digest of Technical Papers - SID International Symposium. 2005. p. 542–545.

Published In

Digest of Technical Papers - SID International Symposium

DOI

ISSN

0097-966X

Publication Date

December 1, 2005

Volume

36

Issue

1

Start / End Page

542 / 545