Three Dimensional Integration of an 8x8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry
Publication
, Conference
Fike, S; Buchanan, B; Jokerst, NM; Brooke, MA; Morris, T; DeWeerth, S
Published in: Optics InfoBase Conference Papers
January 1, 1995
This paper reports the three dimensional integration of an 8x8 array of individually addressable thin film GaAs based photodetectors with vertical electrical interconnects to underlying silicon circuitry. This array demonstrated a yield of 100%.
Duke Scholars
Published In
Optics InfoBase Conference Papers
EISSN
2162-2701
ISBN
1557524009
Publication Date
January 1, 1995
Citation
APA
Chicago
ICMJE
MLA
NLM
Fike, S., Buchanan, B., Jokerst, N. M., Brooke, M. A., Morris, T., & DeWeerth, S. (1995). Three Dimensional Integration of an 8x8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry. In Optics InfoBase Conference Papers.
Fike, S., B. Buchanan, N. M. Jokerst, M. A. Brooke, T. Morris, and S. DeWeerth. “Three Dimensional Integration of an 8x8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry.” In Optics InfoBase Conference Papers, 1995.
Fike S, Buchanan B, Jokerst NM, Brooke MA, Morris T, DeWeerth S. Three Dimensional Integration of an 8x8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry. In: Optics InfoBase Conference Papers. 1995.
Fike, S., et al. “Three Dimensional Integration of an 8x8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry.” Optics InfoBase Conference Papers, 1995.
Fike S, Buchanan B, Jokerst NM, Brooke MA, Morris T, DeWeerth S. Three Dimensional Integration of an 8x8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry. Optics InfoBase Conference Papers. 1995.
Published In
Optics InfoBase Conference Papers
EISSN
2162-2701
ISBN
1557524009
Publication Date
January 1, 1995