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Design of microfabricated inductors for microprocessor power delivery

Publication ,  Conference
Mehas, GJ; Coonley, KD; Sullivan, CR
Published in: Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC
January 1, 1999

Microfabricated inductor designs are proposed for converters for microprocessor power delivery. The fabrication process uses anisotropic silicon etching to form V-grooves; granular metal/insulator nanoscale composite magnetic materials; and copper conductors. An application specific calculation procedure results in an inductor design with predicted power density over 200 W/cm2 at 95% efficiency for an 8 MHz, 3.6 V to 1.1 V converter.

Duke Scholars

Published In

Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC

DOI

Publication Date

January 1, 1999

Volume

2

Start / End Page

1181 / 1187
 

Citation

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Mehas, G. J., Coonley, K. D., & Sullivan, C. R. (1999). Design of microfabricated inductors for microprocessor power delivery. In Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC (Vol. 2, pp. 1181–1187). https://doi.org/10.1109/apec.1999.750518
Mehas, G. J., K. D. Coonley, and C. R. Sullivan. “Design of microfabricated inductors for microprocessor power delivery.” In Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC, 2:1181–87, 1999. https://doi.org/10.1109/apec.1999.750518.
Mehas GJ, Coonley KD, Sullivan CR. Design of microfabricated inductors for microprocessor power delivery. In: Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC. 1999. p. 1181–7.
Mehas, G. J., et al. “Design of microfabricated inductors for microprocessor power delivery.” Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC, vol. 2, 1999, pp. 1181–87. Scopus, doi:10.1109/apec.1999.750518.
Mehas GJ, Coonley KD, Sullivan CR. Design of microfabricated inductors for microprocessor power delivery. Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC. 1999. p. 1181–1187.

Published In

Conference Proceedings IEEE Applied Power Electronics Conference and Exposition APEC

DOI

Publication Date

January 1, 1999

Volume

2

Start / End Page

1181 / 1187