Kinetics of laser‐induced liquid metal etching of a‐Si films
Publication
, Journal Article
Bostanjoglo, O; Endruschat, E; Tornow, W
Published in: physica status solidi (a)
January 1, 1985
It ist demonstrated that spatially modulated laser pulse‐induced melting of semiconductor/metal films can be used to generate micropatterns in semiconductors. The kinetics of the phase transitions are traced by time‐resolved electron microscopy down to specimen areas of 0.5 μm Ø. In the case of a‐Si/Al films crystallization of a‐Si, formation of Al‐silicides and transport of material by liquid motion are observed. These processes proceeded with velocities of some 10 m/s. Copyright © 1985 WILEY‐VCH Verlag GmbH & Co. KGaA
Duke Scholars
Published In
physica status solidi (a)
DOI
EISSN
1521-396X
ISSN
0031-8965
Publication Date
January 1, 1985
Volume
90
Issue
2
Start / End Page
457 / 462
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4018 Nanotechnology
- 4016 Materials engineering
- 1007 Nanotechnology
- 0912 Materials Engineering
- 0204 Condensed Matter Physics
Citation
APA
Chicago
ICMJE
MLA
NLM
Bostanjoglo, O., Endruschat, E., & Tornow, W. (1985). Kinetics of laser‐induced liquid metal etching of a‐Si films. Physica Status Solidi (A), 90(2), 457–462. https://doi.org/10.1002/pssa.2210900207
Bostanjoglo, O., E. Endruschat, and W. Tornow. “Kinetics of laser‐induced liquid metal etching of a‐Si films.” Physica Status Solidi (A) 90, no. 2 (January 1, 1985): 457–62. https://doi.org/10.1002/pssa.2210900207.
Bostanjoglo O, Endruschat E, Tornow W. Kinetics of laser‐induced liquid metal etching of a‐Si films. physica status solidi (a). 1985 Jan 1;90(2):457–62.
Bostanjoglo, O., et al. “Kinetics of laser‐induced liquid metal etching of a‐Si films.” Physica Status Solidi (A), vol. 90, no. 2, Jan. 1985, pp. 457–62. Scopus, doi:10.1002/pssa.2210900207.
Bostanjoglo O, Endruschat E, Tornow W. Kinetics of laser‐induced liquid metal etching of a‐Si films. physica status solidi (a). 1985 Jan 1;90(2):457–462.
Published In
physica status solidi (a)
DOI
EISSN
1521-396X
ISSN
0031-8965
Publication Date
January 1, 1985
Volume
90
Issue
2
Start / End Page
457 / 462
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4018 Nanotechnology
- 4016 Materials engineering
- 1007 Nanotechnology
- 0912 Materials Engineering
- 0204 Condensed Matter Physics