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Kinetics of laser‐induced liquid metal etching of a‐Si films

Publication ,  Journal Article
Bostanjoglo, O; Endruschat, E; Tornow, W
Published in: physica status solidi (a)
January 1, 1985

It ist demonstrated that spatially modulated laser pulse‐induced melting of semiconductor/metal films can be used to generate micropatterns in semiconductors. The kinetics of the phase transitions are traced by time‐resolved electron microscopy down to specimen areas of 0.5 μm Ø. In the case of a‐Si/Al films crystallization of a‐Si, formation of Al‐silicides and transport of material by liquid motion are observed. These processes proceeded with velocities of some 10 m/s. Copyright © 1985 WILEY‐VCH Verlag GmbH & Co. KGaA

Duke Scholars

Published In

physica status solidi (a)

DOI

EISSN

1521-396X

ISSN

0031-8965

Publication Date

January 1, 1985

Volume

90

Issue

2

Start / End Page

457 / 462

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4018 Nanotechnology
  • 4016 Materials engineering
  • 1007 Nanotechnology
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics
 

Citation

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Bostanjoglo, O., Endruschat, E., & Tornow, W. (1985). Kinetics of laser‐induced liquid metal etching of a‐Si films. Physica Status Solidi (A), 90(2), 457–462. https://doi.org/10.1002/pssa.2210900207
Bostanjoglo, O., E. Endruschat, and W. Tornow. “Kinetics of laser‐induced liquid metal etching of a‐Si films.” Physica Status Solidi (A) 90, no. 2 (January 1, 1985): 457–62. https://doi.org/10.1002/pssa.2210900207.
Bostanjoglo O, Endruschat E, Tornow W. Kinetics of laser‐induced liquid metal etching of a‐Si films. physica status solidi (a). 1985 Jan 1;90(2):457–62.
Bostanjoglo, O., et al. “Kinetics of laser‐induced liquid metal etching of a‐Si films.” Physica Status Solidi (A), vol. 90, no. 2, Jan. 1985, pp. 457–62. Scopus, doi:10.1002/pssa.2210900207.
Bostanjoglo O, Endruschat E, Tornow W. Kinetics of laser‐induced liquid metal etching of a‐Si films. physica status solidi (a). 1985 Jan 1;90(2):457–462.

Published In

physica status solidi (a)

DOI

EISSN

1521-396X

ISSN

0031-8965

Publication Date

January 1, 1985

Volume

90

Issue

2

Start / End Page

457 / 462

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4018 Nanotechnology
  • 4016 Materials engineering
  • 1007 Nanotechnology
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics