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One-dimensional ballistic transport in AlGaAs/GaAs electron waveguides

Publication ,  Journal Article
Behringer, RE; Mankiewich, PM; Timp, G; Howard, RE; Baranger, HU; Cunningham, J; Sampere, S
Published in: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
November 1, 1989

Recently, there has been growing interest in exploring the limits to scaling of semiconductor devices, and in understanding their characteristics in the regime where quantum effects and ballistic transport dominate. Using high-resolution fabrication techniques on high-mobility, modulation-doped AlGaAs/GaAs, it is possible to confine the two-dimensional electron gas (2DEG) to structures that are smaller than both the inelastic and elastic scattering lengths, and are comparable in size to the electron wavelength. The conduction of such a device should be one dimensional and ballistic. Unlike large samples, the resistance of these ballistic devices does not follow classical equations; it is primarily caused by electron interference and scattering from the geometry of the sample, not by impurities. On this scale, these structures behave as electron waveguides not as diffusive conductors. We have used electron-beam lithography and high-resolution reaction ion etching to produce samples with well controlled, complicated geometries. These devices use either depletion from an etched surface, or the application of a gate voltage to electrostatically confine the 2DEG to a narrow conducting channel. Transport measurements exhibit electron interference effects, nonlocal resistance fluctuations, resistance that does not scale with length, and quantization-of-resistance as a function of width and carrier density. The experiments correspond well to theoretical calculations of simple electron waveguides, and show that in these one-dimensional ballistic devices, the measured resistance is primarily caused by scattering from the structure of the sample itself.

Duke Scholars

Published In

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

DOI

EISSN

2327-9877

ISSN

0734-211X

Publication Date

November 1, 1989

Volume

7

Issue

6

Start / End Page

2039 / 2043

Publisher

American Vacuum Society
 

Citation

APA
Chicago
ICMJE
MLA
NLM
Behringer, R. E., Mankiewich, P. M., Timp, G., Howard, R. E., Baranger, H. U., Cunningham, J., & Sampere, S. (1989). One-dimensional ballistic transport in AlGaAs/GaAs electron waveguides. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 7(6), 2039–2043. https://doi.org/10.1116/1.584644
Behringer, R. E., P. M. Mankiewich, G. Timp, R. E. Howard, H. U. Baranger, J. Cunningham, and S. Sampere. “One-dimensional ballistic transport in AlGaAs/GaAs electron waveguides.” Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 7, no. 6 (November 1, 1989): 2039–43. https://doi.org/10.1116/1.584644.
Behringer RE, Mankiewich PM, Timp G, Howard RE, Baranger HU, Cunningham J, et al. One-dimensional ballistic transport in AlGaAs/GaAs electron waveguides. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. 1989 Nov 1;7(6):2039–43.
Behringer, R. E., et al. “One-dimensional ballistic transport in AlGaAs/GaAs electron waveguides.” Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, vol. 7, no. 6, American Vacuum Society, Nov. 1989, pp. 2039–43. Crossref, doi:10.1116/1.584644.
Behringer RE, Mankiewich PM, Timp G, Howard RE, Baranger HU, Cunningham J, Sampere S. One-dimensional ballistic transport in AlGaAs/GaAs electron waveguides. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. American Vacuum Society; 1989 Nov 1;7(6):2039–2043.

Published In

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

DOI

EISSN

2327-9877

ISSN

0734-211X

Publication Date

November 1, 1989

Volume

7

Issue

6

Start / End Page

2039 / 2043

Publisher

American Vacuum Society