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The ion implantation of helium into gold. A combined X‐ray reflection spectroscopy and Rutherford backscattering study

Publication ,  Journal Article
Cocks, FH; Pollock, JTA
Published in: physica status solidi (a)
January 1, 1986

Two methods are used to investigate the very near surface (0 to 10 nm) effect of 3 keV helium implantation into evaporated gold films. X‐ray reflection spectroscopy is used to determine the change in density of theimplanted layer and Rutherford backscattering to determine helium concentrations; a maximum of 3.3 He atoms per metal vacancy is reported for a fluence of 4.0 × × 1016 atoms cm−2. The data support the proposition that for implant conditions below those required for exfoliation, there are helium pressures well in excess of 100 kbar within implantation induced voids. Copyright © 1986 WILEY‐VCH Verlag GmbH & Co. KGaA

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Published In

physica status solidi (a)

DOI

EISSN

1521-396X

ISSN

0031-8965

Publication Date

January 1, 1986

Volume

95

Issue

1

Start / End Page

141 / 148

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4018 Nanotechnology
  • 4016 Materials engineering
  • 1007 Nanotechnology
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics
 

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Cocks, F. H., & Pollock, J. T. A. (1986). The ion implantation of helium into gold. A combined X‐ray reflection spectroscopy and Rutherford backscattering study. Physica Status Solidi (A), 95(1), 141–148. https://doi.org/10.1002/pssa.2210950117
Cocks, F. H., and J. T. A. Pollock. “The ion implantation of helium into gold. A combined X‐ray reflection spectroscopy and Rutherford backscattering study.” Physica Status Solidi (A) 95, no. 1 (January 1, 1986): 141–48. https://doi.org/10.1002/pssa.2210950117.
Cocks, F. H., and J. T. A. Pollock. “The ion implantation of helium into gold. A combined X‐ray reflection spectroscopy and Rutherford backscattering study.” Physica Status Solidi (A), vol. 95, no. 1, Jan. 1986, pp. 141–48. Scopus, doi:10.1002/pssa.2210950117.

Published In

physica status solidi (a)

DOI

EISSN

1521-396X

ISSN

0031-8965

Publication Date

January 1, 1986

Volume

95

Issue

1

Start / End Page

141 / 148

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4018 Nanotechnology
  • 4016 Materials engineering
  • 1007 Nanotechnology
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics