Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms
Publication
, Journal Article
Wilkinson, ST; Kim, YW; Jokerst, NM; Allen, MG
Published in: IEEE Photonics Technology Letters
January 1, 1994
The integration of a thin film optoelectronic device onto a micromachined movable platform is reported in this letter. This micro-opto-mechanical system, consisting of a thin film AlGaAs/GaAs double heterostructure p-i-n detector integrated onto a polyimide micromachined platform on silicon, has applications which range from fiber optic coupling to sensors. Fiber optic coupling is demonstrated using a stationary fiber positioned above the thin film detector. By applying a voltage between the platform and actuation strips, the platform moves and a change in fiber to detector coupling is observed. © 1994 IEEE
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Published In
IEEE Photonics Technology Letters
DOI
EISSN
1941-0174
ISSN
1041-1135
Publication Date
January 1, 1994
Volume
6
Issue
9
Start / End Page
1115 / 1118
Related Subject Headings
- Optoelectronics & Photonics
- 5102 Atomic, molecular and optical physics
- 4006 Communications engineering
- 0906 Electrical and Electronic Engineering
- 0205 Optical Physics
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MLA
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Wilkinson, S. T., Kim, Y. W., Jokerst, N. M., & Allen, M. G. (1994). Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms. IEEE Photonics Technology Letters, 6(9), 1115–1118. https://doi.org/10.1109/68.324685
Wilkinson, S. T., Y. W. Kim, N. M. Jokerst, and M. G. Allen. “Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms.” IEEE Photonics Technology Letters 6, no. 9 (January 1, 1994): 1115–18. https://doi.org/10.1109/68.324685.
Wilkinson ST, Kim YW, Jokerst NM, Allen MG. Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms. IEEE Photonics Technology Letters. 1994 Jan 1;6(9):1115–8.
Wilkinson, S. T., et al. “Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms.” IEEE Photonics Technology Letters, vol. 6, no. 9, Jan. 1994, pp. 1115–18. Scopus, doi:10.1109/68.324685.
Wilkinson ST, Kim YW, Jokerst NM, Allen MG. Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms. IEEE Photonics Technology Letters. 1994 Jan 1;6(9):1115–1118.
Published In
IEEE Photonics Technology Letters
DOI
EISSN
1941-0174
ISSN
1041-1135
Publication Date
January 1, 1994
Volume
6
Issue
9
Start / End Page
1115 / 1118
Related Subject Headings
- Optoelectronics & Photonics
- 5102 Atomic, molecular and optical physics
- 4006 Communications engineering
- 0906 Electrical and Electronic Engineering
- 0205 Optical Physics