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Raman scattering characterization of carbon bonding in diamond and diamondlike thin films

Publication ,  Journal Article
Nemanich, RJ; Glass, JT; Lucovsky, G; Shroder, RE
Published in: J. Vac. Sci. Technol. A, Vac. Surf. Films (USA)
1988

The atomic bonding configurations of carbon bonding in diamond and diamondlike thin films are explored using Raman scattering. The general aspects of Raman scattering from composites are presented. Effects are discussed due to crystalline or amorphous structures, large versus microcrystalline domains, and strong optical absorption and transparent regions. The Raman scattering from diamondlike films shows several features which are attributed to microcrystalline graphitelike structures which all originate from the same region in the sample. In contrast, the spectra of diamond films show features attributed to different components of a composite film. Components identified are crystalline diamond, and disordered and microcrystalline graphitic structures. The presence of precursor microcrystalline or amorphous diamond structures is also suggested

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Published In

J. Vac. Sci. Technol. A, Vac. Surf. Films (USA)

DOI

Publication Date

1988

Volume

6

Issue

3

Start / End Page

1783 / 1787

Location

Anaheim, CA, USA

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences
 

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Nemanich, R. J., Glass, J. T., Lucovsky, G., & Shroder, R. E. (1988). Raman scattering characterization of carbon bonding in diamond and diamondlike thin films. J. Vac. Sci. Technol. A, Vac. Surf. Films (USA), 6(3), 1783–1787. https://doi.org/10.1116/1.575297
Nemanich, R. J., J. T. Glass, G. Lucovsky, and R. E. Shroder. “Raman scattering characterization of carbon bonding in diamond and diamondlike thin films.” J. Vac. Sci. Technol. A, Vac. Surf. Films (USA) 6, no. 3 (1988): 1783–87. https://doi.org/10.1116/1.575297.
Nemanich RJ, Glass JT, Lucovsky G, Shroder RE. Raman scattering characterization of carbon bonding in diamond and diamondlike thin films. J Vac Sci Technol A, Vac Surf Films (USA). 1988;6(3):1783–7.
Nemanich, R. J., et al. “Raman scattering characterization of carbon bonding in diamond and diamondlike thin films.” J. Vac. Sci. Technol. A, Vac. Surf. Films (USA), vol. 6, no. 3, 1988, pp. 1783–87. Manual, doi:10.1116/1.575297.
Nemanich RJ, Glass JT, Lucovsky G, Shroder RE. Raman scattering characterization of carbon bonding in diamond and diamondlike thin films. J Vac Sci Technol A, Vac Surf Films (USA). 1988;6(3):1783–1787.

Published In

J. Vac. Sci. Technol. A, Vac. Surf. Films (USA)

DOI

Publication Date

1988

Volume

6

Issue

3

Start / End Page

1783 / 1787

Location

Anaheim, CA, USA

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences