Skip to main content

Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers.

Publication ,  Journal Article
Dausch, DE; Castellucci, JB; Chou, DR; von Ramm, OT
Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control
November 2008

Piezoelectric micromachined ultrasound transducers (pMUTs) are a new approach for the construction of 2-D arrays for forward-looking 3-D intravascular (IVUS) and intracardiac (ICE) imaging. Two-dimensional pMUT test arrays containing 25 elements (5 x 5 arrays) were bulk micromachined in silicon substrates. The devices consisted of lead zirconate titanate (PZT) thin film membranes formed by deep reactive ion etching of the silicon substrate. Element widths ranged from 50 to 200 microm with pitch from 100 to 300 mum. Acoustic transmit properties were measured in de-ionized water with a calibrated hydrophone placed at a range of 20 mm. Measured transmit frequencies for the pMUT elements ranged from 4 to 13 MHz, and mode of vibration differed for the various element sizes. Element capacitance varied from 30 to over 400 pF depending on element size and PZT thickness. Smaller element sizes generally produced higher acoustic transmit output as well as higher frequency than larger elements. Thicker PZT layers also produced higher transmit output per unit electric field applied. Due to flexure mode operation above the PZT coercive voltage, transmit output increased nonlinearly with increased drive voltage. The pMUT arrays were attached directly to the Duke University T5 Phased Array Scanner to produce real-time pulse-echo B-mode images with the 2-D pMUT arrays.

Duke Scholars

Altmetric Attention Stats
Dimensions Citation Stats

Published In

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

DOI

EISSN

1525-8955

ISSN

0885-3010

Publication Date

November 2008

Volume

55

Issue

11

Start / End Page

2484 / 2492

Related Subject Headings

  • Ultrasonography
  • Transducers
  • Miniaturization
  • Micro-Electrical-Mechanical Systems
  • Equipment Failure Analysis
  • Equipment Design
  • Electric Capacitance
  • Echocardiography
  • Computer-Aided Design
  • Acoustics
 

Citation

APA
Chicago
ICMJE
MLA
NLM
Dausch, D. E., Castellucci, J. B., Chou, D. R., & von Ramm, O. T. (2008). Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 55(11), 2484–2492. https://doi.org/10.1109/tuffc.956
Dausch, David E., John B. Castellucci, Derrick R. Chou, and Olaf T. von Ramm. “Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers.IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 55, no. 11 (November 2008): 2484–92. https://doi.org/10.1109/tuffc.956.
Dausch DE, Castellucci JB, Chou DR, von Ramm OT. Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers. IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2008 Nov;55(11):2484–92.
Dausch, David E., et al. “Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers.IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 55, no. 11, Nov. 2008, pp. 2484–92. Epmc, doi:10.1109/tuffc.956.
Dausch DE, Castellucci JB, Chou DR, von Ramm OT. Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers. IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2008 Nov;55(11):2484–2492.

Published In

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

DOI

EISSN

1525-8955

ISSN

0885-3010

Publication Date

November 2008

Volume

55

Issue

11

Start / End Page

2484 / 2492

Related Subject Headings

  • Ultrasonography
  • Transducers
  • Miniaturization
  • Micro-Electrical-Mechanical Systems
  • Equipment Failure Analysis
  • Equipment Design
  • Electric Capacitance
  • Echocardiography
  • Computer-Aided Design
  • Acoustics