Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone
Publication
, Journal Article
Liu, J; Martin, DT; Kadirvel, K; Nishida, T; Catafesta, LN; Sheplak, M; Mann, BP
Published in: Journal of Sound and Vibration
2008
Duke Scholars
Published In
Journal of Sound and Vibration
Publication Date
2008
Volume
309
Start / End Page
276 / 292
Related Subject Headings
- Acoustics
- 51 Physical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Liu, J., Martin, D. T., Kadirvel, K., Nishida, T., Catafesta, L. N., Sheplak, M., & Mann, B. P. (2008). Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone. Journal of Sound and Vibration, 309, 276–292.
Liu, J., D. T. Martin, K. Kadirvel, T. Nishida, L. N. Catafesta, M. Sheplak, and B. P. Mann. “Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone.” Journal of Sound and Vibration 309 (2008): 276–92.
Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, et al. Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone. Journal of Sound and Vibration. 2008;309:276–92.
Liu, J., et al. “Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone.” Journal of Sound and Vibration, vol. 309, 2008, pp. 276–92.
Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, Mann BP. Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone. Journal of Sound and Vibration. 2008;309:276–292.
Published In
Journal of Sound and Vibration
Publication Date
2008
Volume
309
Start / End Page
276 / 292
Related Subject Headings
- Acoustics
- 51 Physical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences