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Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone

Publication ,  Journal Article
Liu, J; Martin, DT; Kadirvel, K; Nishida, T; Catafesta, LN; Sheplak, M; Mann, BP
Published in: Journal of Sound and Vibration
2008

Duke Scholars

Published In

Journal of Sound and Vibration

Publication Date

2008

Volume

309

Start / End Page

276 / 292

Related Subject Headings

  • Acoustics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences
 

Citation

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Liu, J., Martin, D. T., Kadirvel, K., Nishida, T., Catafesta, L. N., Sheplak, M., & Mann, B. P. (2008). Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone. Journal of Sound and Vibration, 309, 276–292.
Liu, J., D. T. Martin, K. Kadirvel, T. Nishida, L. N. Catafesta, M. Sheplak, and B. P. Mann. “Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone.” Journal of Sound and Vibration 309 (2008): 276–92.
Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, et al. Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone. Journal of Sound and Vibration. 2008;309:276–92.
Liu, J., et al. “Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone.” Journal of Sound and Vibration, vol. 309, 2008, pp. 276–92.
Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, Mann BP. Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone. Journal of Sound and Vibration. 2008;309:276–292.

Published In

Journal of Sound and Vibration

Publication Date

2008

Volume

309

Start / End Page

276 / 292

Related Subject Headings

  • Acoustics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences