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Harmonic balance nonlinear identification of a capacitive dual-backplate MEMS microphone

Publication ,  Journal Article
Liu, J; Martin, DT; Nishida, T; Cattafesta, LN; Sheplak, M; Mann, BP
Published in: Journal of Microelectromechanical Systems
June 1, 2008

This paper describes the application of a nonlinear identification method to extract model parameters from the steady-state response of a capacitive dual-backplate microelectromechanical systems microphone. The microphone is modeled as a single-degree-of-freedom second-order system with both electrostatic and mechanical nonlinearities. A harmonic balance approach is applied to the nonlinear governing equation to obtain a set of algebraic equations that relate the unknown system parameters to the steady-state response of the microphone. Numerical simulations of the governing equation are also performed, using theoretical system parameters, to validate the accuracy of the harmonic balance solution for a weakly nonlinear microphone system with low damping. Finally, the microphone is experimentally characterized by extracting the system parameters from the response amplitude and phase relationships of the experimental data. © 2008 IEEE.

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Published In

Journal of Microelectromechanical Systems

DOI

ISSN

1057-7157

Publication Date

June 1, 2008

Volume

17

Issue

3

Start / End Page

698 / 708

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 4017 Mechanical engineering
  • 4009 Electronics, sensors and digital hardware
  • 0913 Mechanical Engineering
  • 0910 Manufacturing Engineering
  • 0906 Electrical and Electronic Engineering
 

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Liu, J., Martin, D. T., Nishida, T., Cattafesta, L. N., Sheplak, M., & Mann, B. P. (2008). Harmonic balance nonlinear identification of a capacitive dual-backplate MEMS microphone. Journal of Microelectromechanical Systems, 17(3), 698–708. https://doi.org/10.1109/JMEMS.2008.922067
Liu, J., D. T. Martin, T. Nishida, L. N. Cattafesta, M. Sheplak, and B. P. Mann. “Harmonic balance nonlinear identification of a capacitive dual-backplate MEMS microphone.” Journal of Microelectromechanical Systems 17, no. 3 (June 1, 2008): 698–708. https://doi.org/10.1109/JMEMS.2008.922067.
Liu J, Martin DT, Nishida T, Cattafesta LN, Sheplak M, Mann BP. Harmonic balance nonlinear identification of a capacitive dual-backplate MEMS microphone. Journal of Microelectromechanical Systems. 2008 Jun 1;17(3):698–708.
Liu, J., et al. “Harmonic balance nonlinear identification of a capacitive dual-backplate MEMS microphone.” Journal of Microelectromechanical Systems, vol. 17, no. 3, June 2008, pp. 698–708. Scopus, doi:10.1109/JMEMS.2008.922067.
Liu J, Martin DT, Nishida T, Cattafesta LN, Sheplak M, Mann BP. Harmonic balance nonlinear identification of a capacitive dual-backplate MEMS microphone. Journal of Microelectromechanical Systems. 2008 Jun 1;17(3):698–708.

Published In

Journal of Microelectromechanical Systems

DOI

ISSN

1057-7157

Publication Date

June 1, 2008

Volume

17

Issue

3

Start / End Page

698 / 708

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 4017 Mechanical engineering
  • 4009 Electronics, sensors and digital hardware
  • 0913 Mechanical Engineering
  • 0910 Manufacturing Engineering
  • 0906 Electrical and Electronic Engineering