Bias-controlled chemical vapor deposition of diamond thin films
Publication
, Journal Article
Lee, YH; Richard, PD; Bachmann, KJ; Glass, JT
Published in: Applied Physics Letters
December 1, 1990
The growth of diamond films on (001) Si substrates by bias-controlled chemical vapor deposition is described. The film quality as judged by Raman spectroscopy and scanning electron microscopy depends strongly on the biasing conditions. Under low current reverse bias conditions, highly facetted cubo-octahedral diamond growth exhibiting a single sharp Raman line at 1332 cm-1 was obtained, while biasing in high current conditions which created a plasma resulted in multiply twinned, microcrystalline growth incorporating sp2-bonded carbon into the diamond film.
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Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1990
Volume
56
Issue
7
Start / End Page
620 / 622
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
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Lee, Y. H., Richard, P. D., Bachmann, K. J., & Glass, J. T. (1990). Bias-controlled chemical vapor deposition of diamond thin films. Applied Physics Letters, 56(7), 620–622. https://doi.org/10.1063/1.102716
Lee, Y. H., P. D. Richard, K. J. Bachmann, and J. T. Glass. “Bias-controlled chemical vapor deposition of diamond thin films.” Applied Physics Letters 56, no. 7 (December 1, 1990): 620–22. https://doi.org/10.1063/1.102716.
Lee YH, Richard PD, Bachmann KJ, Glass JT. Bias-controlled chemical vapor deposition of diamond thin films. Applied Physics Letters. 1990 Dec 1;56(7):620–2.
Lee, Y. H., et al. “Bias-controlled chemical vapor deposition of diamond thin films.” Applied Physics Letters, vol. 56, no. 7, Dec. 1990, pp. 620–22. Scopus, doi:10.1063/1.102716.
Lee YH, Richard PD, Bachmann KJ, Glass JT. Bias-controlled chemical vapor deposition of diamond thin films. Applied Physics Letters. 1990 Dec 1;56(7):620–622.
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1990
Volume
56
Issue
7
Start / End Page
620 / 622
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences