A surface micromachined capacitive pressure sensor for intraocular pressure measurement
Publication
, Conference
Katuri, KC; Ramasubramanian, MK; Asrani, S
Published in: Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010
October 8, 2010
In glaucoma patients, intraocular pressure (IOP) is a parameter that plays significant role in disease diagnosis and treatment. Continuous IOP measurements could help capture fluctuations in IOP that are found to be relevant to disease progression. In this paper, an implantable surface micromachined capacitive pressure sensor that can be used as a part of LC tank implant circuit is discussed. A three layer Polysilicon process was used for sensor fabrication. A preliminary study on sensor coil is also presented. © 2010 IEEE.
Duke Scholars
Published In
Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010
DOI
ISBN
9781424471010
Publication Date
October 8, 2010
Start / End Page
149 / 154
Citation
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MLA
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Katuri, K. C., Ramasubramanian, M. K., & Asrani, S. (2010). A surface micromachined capacitive pressure sensor for intraocular pressure measurement. In Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010 (pp. 149–154). https://doi.org/10.1109/MESA.2010.5552077
Katuri, K. C., M. K. Ramasubramanian, and S. Asrani. “A surface micromachined capacitive pressure sensor for intraocular pressure measurement.” In Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010, 149–54, 2010. https://doi.org/10.1109/MESA.2010.5552077.
Katuri KC, Ramasubramanian MK, Asrani S. A surface micromachined capacitive pressure sensor for intraocular pressure measurement. In: Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010. 2010. p. 149–54.
Katuri, K. C., et al. “A surface micromachined capacitive pressure sensor for intraocular pressure measurement.” Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010, 2010, pp. 149–54. Scopus, doi:10.1109/MESA.2010.5552077.
Katuri KC, Ramasubramanian MK, Asrani S. A surface micromachined capacitive pressure sensor for intraocular pressure measurement. Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010. 2010. p. 149–154.
Published In
Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2010
DOI
ISBN
9781424471010
Publication Date
October 8, 2010
Start / End Page
149 / 154