Polymer waveguide optical interconnections on Si CMOS circuits
Publication
, Journal Article
Cho, SY; Thomas, M; Kim, DI; Jokerst, NM; Brooke, M
Published in: Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
January 1, 2002
Optical interconnections, on foundry silicon complementary metal oxide semiconductors (CMOS) circuits using polymer optical waveguides, was demonstrated. The polymer optical waveguides were directly fabricated on two Si CMOS circuits. The channel in the fabricated waveguide was defined by reactive ion etching through silica hard mask. Results indicated that increase in the incident optical power into the optical waveguide resulted in increase in the mean of the bit stream samples.
Duke Scholars
Published In
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Publication Date
January 1, 2002
Start / End Page
161
Citation
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Cho, S. Y., Thomas, M., Kim, D. I., Jokerst, N. M., & Brooke, M. (2002). Polymer waveguide optical interconnections on Si CMOS circuits. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 161.
Cho, S. Y., M. Thomas, D. I. Kim, N. M. Jokerst, and M. Brooke. “Polymer waveguide optical interconnections on Si CMOS circuits.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, January 1, 2002, 161.
Cho SY, Thomas M, Kim DI, Jokerst NM, Brooke M. Polymer waveguide optical interconnections on Si CMOS circuits. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;161.
Cho, S. Y., et al. “Polymer waveguide optical interconnections on Si CMOS circuits.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, Jan. 2002, p. 161.
Cho SY, Thomas M, Kim DI, Jokerst NM, Brooke M. Polymer waveguide optical interconnections on Si CMOS circuits. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;161.
Published In
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Publication Date
January 1, 2002
Start / End Page
161