Skip to main content

Polymer waveguide optical interconnections on Si CMOS circuits

Publication ,  Journal Article
Cho, SY; Thomas, M; Kim, DI; Jokerst, NM; Brooke, M
Published in: Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
January 1, 2002

Optical interconnections, on foundry silicon complementary metal oxide semiconductors (CMOS) circuits using polymer optical waveguides, was demonstrated. The polymer optical waveguides were directly fabricated on two Si CMOS circuits. The channel in the fabricated waveguide was defined by reactive ion etching through silica hard mask. Results indicated that increase in the incident optical power into the optical waveguide resulted in increase in the mean of the bit stream samples.

Duke Scholars

Published In

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Publication Date

January 1, 2002

Start / End Page

161
 

Citation

APA
Chicago
ICMJE
MLA
NLM
Cho, S. Y., Thomas, M., Kim, D. I., Jokerst, N. M., & Brooke, M. (2002). Polymer waveguide optical interconnections on Si CMOS circuits. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 161.
Cho, S. Y., M. Thomas, D. I. Kim, N. M. Jokerst, and M. Brooke. “Polymer waveguide optical interconnections on Si CMOS circuits.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, January 1, 2002, 161.
Cho SY, Thomas M, Kim DI, Jokerst NM, Brooke M. Polymer waveguide optical interconnections on Si CMOS circuits. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;161.
Cho, S. Y., et al. “Polymer waveguide optical interconnections on Si CMOS circuits.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, Jan. 2002, p. 161.
Cho SY, Thomas M, Kim DI, Jokerst NM, Brooke M. Polymer waveguide optical interconnections on Si CMOS circuits. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;161.

Published In

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Publication Date

January 1, 2002

Start / End Page

161