High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices
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, Journal Article
Natarajan, S; Parker, CB; Glass, JT; Bower, CA; Gilchrist, KH; Piascik, JR; Stoner, BR
Published in: 2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC
September 15, 2008
We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 μm-thick silicon dioxide layer to the device. The device is fabricated using MEMS fabrication principles and utilizes carbon nanotubes as field emitters. A dc amplification factor of 600 was obtained. To the best of our knowledge, this is the highest value reported for CNT-enabled microtriode devices. The high voltage capability of these microscale devices will enable their use in a wider variety of applications such as miniature ion sources and xray sources. © 2008 IEEE.
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2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC
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Publication Date
September 15, 2008
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24 / 25
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Natarajan, S., Parker, C. B., Glass, J. T., Bower, C. A., Gilchrist, K. H., Piascik, J. R., & Stoner, B. R. (2008). High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices. 2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC, 24–25. https://doi.org/10.1109/IVELEC.2008.4556325
Natarajan, S., C. B. Parker, J. T. Glass, C. A. Bower, K. H. Gilchrist, J. R. Piascik, and B. R. Stoner. “High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices.” 2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC, September 15, 2008, 24–25. https://doi.org/10.1109/IVELEC.2008.4556325.
Natarajan S, Parker CB, Glass JT, Bower CA, Gilchrist KH, Piascik JR, et al. High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices. 2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC. 2008 Sep 15;24–5.
Natarajan, S., et al. “High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices.” 2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC, Sept. 2008, pp. 24–25. Scopus, doi:10.1109/IVELEC.2008.4556325.
Natarajan S, Parker CB, Glass JT, Bower CA, Gilchrist KH, Piascik JR, Stoner BR. High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices. 2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC. 2008 Sep 15;24–25.
Published In
2008 IEEE International Vacuum Electronics Conference, IVEC with 9th IEEE International Vacuum Electron Sources Conference, IVESC
DOI
Publication Date
September 15, 2008
Start / End Page
24 / 25