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Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate

Publication ,  Journal Article
Palit, S; Royal, M; Jokerst, N; Kirch, J; Mawst, L
Published in: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
January 1, 2012

The planar integration of on-chip laser sources with optical sensing elements, waveguide optical interconnect, and detectors enables the implementation of portable, efficient chip-scale systems, with applications in areas that include medical, environmental, biological, and chemical sensing systems. In this paper, the planar integration of a thin film strain compensated In0.2Ga0.8As/GaAs single quantum well laser with a tapered polymer (SU-8-2002) waveguide and overlap coupled SU-8-2002 microring resonator is achieved on an SiO2/Si platform. Two laser/waveguide configurations, one with the tapered waveguide separated from the laser front facet and the other with the waveguide overlapping the front facet, were demonstrated, and this laser/waveguide structure was then integrated with a polymer microring resonator on SiO2/Si. Lasing operation for the integrated system was verified through power-current characteristics and spectra at the through and drop ports of the microring resonator. This integrated system forms an essential component toward realizing planar chip-scale optical sensing systems. © 2012 American Vacuum Society.

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Published In

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

DOI

EISSN

2166-2754

ISSN

2166-2746

Publication Date

January 1, 2012

Volume

30

Issue

1

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4016 Materials engineering
  • 0912 Materials Engineering
  • 0901 Aerospace Engineering
  • 0401 Atmospheric Sciences
 

Citation

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MLA
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Palit, S., Royal, M., Jokerst, N., Kirch, J., & Mawst, L. (2012). Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 30(1). https://doi.org/10.1116/1.3676031
Palit, S., M. Royal, N. Jokerst, J. Kirch, and L. Mawst. “Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate.” Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics 30, no. 1 (January 1, 2012). https://doi.org/10.1116/1.3676031.
Palit S, Royal M, Jokerst N, Kirch J, Mawst L. Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 2012 Jan 1;30(1).
Palit, S., et al. “Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate.” Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, vol. 30, no. 1, Jan. 2012. Scopus, doi:10.1116/1.3676031.
Palit S, Royal M, Jokerst N, Kirch J, Mawst L. Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 2012 Jan 1;30(1).

Published In

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

DOI

EISSN

2166-2754

ISSN

2166-2746

Publication Date

January 1, 2012

Volume

30

Issue

1

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4016 Materials engineering
  • 0912 Materials Engineering
  • 0901 Aerospace Engineering
  • 0401 Atmospheric Sciences