Heterogeneous integration of thin-film compound semiconductor lasers and SU8 waveguides on SiO2 /Si
Publication
, Journal Article
Palit, S; Kirch, J; Mawst, L; Kuech, T; Jokerst, NM
Published in: Proceedings of SPIE - The International Society for Optical Engineering
May 10, 2010
We present the heterogeneous integration of a 3.8 μm thick InGaAs/GaAs edge emitting laser that was metal-metal bonded to SiO2/Si and end-fire coupled into a 2.8 μm thick tapered SU8 polymer waveguide integrated on the same substrate. The system was driven in pulsed mode and the waveguide output was captured on an IR imaging array to characterize the mode. The waveguide output was also coupled into a multimode fiber, and into an optical head and spectrum analyzer, indicating lasing at ∼997 nm and a threshold current density of 250 A/cm2. © 2010 Copyright SPIE - The International Society for Optical Engineering.
Duke Scholars
Published In
Proceedings of SPIE - The International Society for Optical Engineering
DOI
ISSN
0277-786X
Publication Date
May 10, 2010
Volume
7607
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering
Citation
APA
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MLA
NLM
Palit, S., Kirch, J., Mawst, L., Kuech, T., & Jokerst, N. M. (2010). Heterogeneous integration of thin-film compound semiconductor lasers and SU8 waveguides on SiO2 /Si. Proceedings of SPIE - The International Society for Optical Engineering, 7607. https://doi.org/10.1117/12.842379
Palit, S., J. Kirch, L. Mawst, T. Kuech, and N. M. Jokerst. “Heterogeneous integration of thin-film compound semiconductor lasers and SU8 waveguides on SiO2 /Si.” Proceedings of SPIE - The International Society for Optical Engineering 7607 (May 10, 2010). https://doi.org/10.1117/12.842379.
Palit S, Kirch J, Mawst L, Kuech T, Jokerst NM. Heterogeneous integration of thin-film compound semiconductor lasers and SU8 waveguides on SiO2 /Si. Proceedings of SPIE - The International Society for Optical Engineering. 2010 May 10;7607.
Palit, S., et al. “Heterogeneous integration of thin-film compound semiconductor lasers and SU8 waveguides on SiO2 /Si.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 7607, May 2010. Scopus, doi:10.1117/12.842379.
Palit S, Kirch J, Mawst L, Kuech T, Jokerst NM. Heterogeneous integration of thin-film compound semiconductor lasers and SU8 waveguides on SiO2 /Si. Proceedings of SPIE - The International Society for Optical Engineering. 2010 May 10;7607.
Published In
Proceedings of SPIE - The International Society for Optical Engineering
DOI
ISSN
0277-786X
Publication Date
May 10, 2010
Volume
7607
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering