Vertically coupled polymer microdisk resonators fabricated by photolithography technique
Publication
, Journal Article
Luan, L; Cho, SY; Jokerst, NM
Published in: Proceedings - Electronic Components and Technology Conference
October 22, 2007
In this paper, a vertically coupled polymer microdisk resonator has been demonstrated and characterized. This vertically coupled resonator is fabricated using polymers instead of semiconductors, as well as standard photolithography instead of electron beam lithography (EBL), in contrast to laterally coupled polymer devices. This vertically coupled structure and fabrication process enables simpler mass manufacture of the microresonators in arrays at the chip scale for applications including integrated sensing and chip scale WDM filters. © 2007 IEEE.
Duke Scholars
Published In
Proceedings - Electronic Components and Technology Conference
DOI
ISSN
0569-5503
Publication Date
October 22, 2007
Start / End Page
2035 / 2040
Citation
APA
Chicago
ICMJE
MLA
NLM
Luan, L., Cho, S. Y., & Jokerst, N. M. (2007). Vertically coupled polymer microdisk resonators fabricated by photolithography technique. Proceedings - Electronic Components and Technology Conference, 2035–2040. https://doi.org/10.1109/ECTC.2007.374082
Luan, L., S. Y. Cho, and N. M. Jokerst. “Vertically coupled polymer microdisk resonators fabricated by photolithography technique.” Proceedings - Electronic Components and Technology Conference, October 22, 2007, 2035–40. https://doi.org/10.1109/ECTC.2007.374082.
Luan L, Cho SY, Jokerst NM. Vertically coupled polymer microdisk resonators fabricated by photolithography technique. Proceedings - Electronic Components and Technology Conference. 2007 Oct 22;2035–40.
Luan, L., et al. “Vertically coupled polymer microdisk resonators fabricated by photolithography technique.” Proceedings - Electronic Components and Technology Conference, Oct. 2007, pp. 2035–40. Scopus, doi:10.1109/ECTC.2007.374082.
Luan L, Cho SY, Jokerst NM. Vertically coupled polymer microdisk resonators fabricated by photolithography technique. Proceedings - Electronic Components and Technology Conference. 2007 Oct 22;2035–2040.
Published In
Proceedings - Electronic Components and Technology Conference
DOI
ISSN
0569-5503
Publication Date
October 22, 2007
Start / End Page
2035 / 2040