Polymer microrings integrated with thin film ingaas MSM photodetectors for Sensor-on-a-Chip applications

A polymer microring has been integrated with an InGaAs photodetector on a Si substrate for chip scale sensing applications. The photocurrent as a function of wavelength agrees well with the spectral response of the microring. This integration of a microring and photodetector onto Si is a first step toward the next generation of "Sensor-on-a-Chip" integrated systems. © 2006 IEEE.

Duke Scholars

Author Nan Marie Jokerst Electrical and Computer Engineering