Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect
Publication
, Journal Article
Gasparyan, A; Shea, H; Arney, S; Aksyuk, V; Simon, ME; Pardo, F; Chan, HB; Kim, J; Gates, J; Kraus, JS; Goyal, S; Carr, D; Kleiman, R
Published in: Conference on Optical Fiber Communication, Technical Digest Series
2003
We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss non-blocking 1000×1000-port optical cross-connect switch. © Optical Society of America.
Duke Scholars
Published In
Conference on Optical Fiber Communication, Technical Digest Series
Publication Date
2003
Volume
86
Start / End Page
908 / 910
Citation
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Chicago
ICMJE
MLA
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Gasparyan, A., Shea, H., Arney, S., Aksyuk, V., Simon, M. E., Pardo, F., … Kleiman, R. (2003). Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect. Conference on Optical Fiber Communication, Technical Digest Series, 86, 908–910.
Gasparyan, A., H. Shea, S. Arney, V. Aksyuk, M. E. Simon, F. Pardo, H. B. Chan, et al. “Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect.” Conference on Optical Fiber Communication, Technical Digest Series 86 (2003): 908–10.
Gasparyan A, Shea H, Arney S, Aksyuk V, Simon ME, Pardo F, et al. Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect. Conference on Optical Fiber Communication, Technical Digest Series. 2003;86:908–10.
Gasparyan, A., et al. “Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect.” Conference on Optical Fiber Communication, Technical Digest Series, vol. 86, 2003, pp. 908–10.
Gasparyan A, Shea H, Arney S, Aksyuk V, Simon ME, Pardo F, Chan HB, Kim J, Gates J, Kraus JS, Goyal S, Carr D, Kleiman R. Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect. Conference on Optical Fiber Communication, Technical Digest Series. 2003;86:908–910.
Published In
Conference on Optical Fiber Communication, Technical Digest Series
Publication Date
2003
Volume
86
Start / End Page
908 / 910