On the road to reliable MEMS
Publication
, Journal Article
Gasparyan, A; Shea, H; Arney, S; Aksyuk, V; Simon, ME; Pardo, F; Chan, HB; Kim, J; Gates, J; Goyal, S; Kleiman, R
Published in: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
2003
Dielectric charging, mechanical creep and fatigue of materials, stresses in thin films, sensitivity to mechanical vibrations and shock is but a partial list of issues that may arise on the road to reliable MEMS. Major electrical and mechanical phenomenon that may limit the lifetime or functionality of MEMS devices will be discussed along with the design rules, materials choices and reliability vs. functionality tradeoffs that are required for designing MEMS for high performance and reliability.
Duke Scholars
Published In
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Publication Date
2003
Volume
2
Start / End Page
626 / 627
Citation
APA
Chicago
ICMJE
MLA
NLM
Gasparyan, A., Shea, H., Arney, S., Aksyuk, V., Simon, M. E., Pardo, F., … Kleiman, R. (2003). On the road to reliable MEMS. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 2, 626–627.
Gasparyan, A., H. Shea, S. Arney, V. Aksyuk, M. E. Simon, F. Pardo, H. B. Chan, et al. “On the road to reliable MEMS.” Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS 2 (2003): 626–27.
Gasparyan A, Shea H, Arney S, Aksyuk V, Simon ME, Pardo F, et al. On the road to reliable MEMS. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 2003;2:626–7.
Gasparyan, A., et al. “On the road to reliable MEMS.” Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 2, 2003, pp. 626–27.
Gasparyan A, Shea H, Arney S, Aksyuk V, Simon ME, Pardo F, Chan HB, Kim J, Gates J, Goyal S, Kleiman R. On the road to reliable MEMS. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 2003;2:626–627.
Published In
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Publication Date
2003
Volume
2
Start / End Page
626 / 627