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A 2.5D integrated voltage regulator using coupled-magnetic-core inductors on silicon interposer

Publication ,  Journal Article
Sturcken, N; O'Sullivan, EJ; Wang, N; Herget, P; Webb, BC; Romankiw, LT; Petracca, M; Davies, R; Fontana, RE; Decad, GM; Kymissis, I ...
Published in: IEEE Journal of Solid-State Circuits
January 1, 2013

An integrated voltage regulator (IVR) is presented that uses custom fabricated thin-film magnetic power inductors. The inductors are fabricated on a silicon interposer and integrated with a multi-phase buck converter IC by 2.5D chip stacking. Several inductor design variations have been fabricated and tested. The best performance has been achieved with a set of eight coupled inductors that each occupies 0.245 mm2 and provides 12.5 nH with 270 mΩ DC. With early inductor prototypes, the IVR efficiency for a 1.8 V:1.0 V conversion ratio peaks at 71% with FEOL current density of 10.8 A/mm 2 and inductor current density of 1.53 A/mm2. At maximum load current, 69% conversion efficiency and 1.8 V:1.2 V conversion ratio the FEOL current density reaches 22.6 A/mm2 and inductor current density reaches 3.21 A/mm2. © 1966-2012 IEEE.

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Published In

IEEE Journal of Solid-State Circuits

DOI

ISSN

0018-9200

Publication Date

January 1, 2013

Volume

48

Issue

1

Start / End Page

244 / 254

Related Subject Headings

  • Electrical & Electronic Engineering
  • 4009 Electronics, sensors and digital hardware
  • 1099 Other Technology
  • 0906 Electrical and Electronic Engineering
  • 0204 Condensed Matter Physics
 

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Sturcken, N., O’Sullivan, E. J., Wang, N., Herget, P., Webb, B. C., Romankiw, L. T., … Shepard, K. L. (2013). A 2.5D integrated voltage regulator using coupled-magnetic-core inductors on silicon interposer. IEEE Journal of Solid-State Circuits, 48(1), 244–254. https://doi.org/10.1109/JSSC.2012.2221237
Sturcken, N., E. J. O’Sullivan, N. Wang, P. Herget, B. C. Webb, L. T. Romankiw, M. Petracca, et al. “A 2.5D integrated voltage regulator using coupled-magnetic-core inductors on silicon interposer.” IEEE Journal of Solid-State Circuits 48, no. 1 (January 1, 2013): 244–54. https://doi.org/10.1109/JSSC.2012.2221237.
Sturcken N, O’Sullivan EJ, Wang N, Herget P, Webb BC, Romankiw LT, et al. A 2.5D integrated voltage regulator using coupled-magnetic-core inductors on silicon interposer. IEEE Journal of Solid-State Circuits. 2013 Jan 1;48(1):244–54.
Sturcken, N., et al. “A 2.5D integrated voltage regulator using coupled-magnetic-core inductors on silicon interposer.” IEEE Journal of Solid-State Circuits, vol. 48, no. 1, Jan. 2013, pp. 244–54. Scopus, doi:10.1109/JSSC.2012.2221237.
Sturcken N, O’Sullivan EJ, Wang N, Herget P, Webb BC, Romankiw LT, Petracca M, Davies R, Fontana RE, Decad GM, Kymissis I, Peterchev AV, Carloni LP, Gallagher WJ, Shepard KL. A 2.5D integrated voltage regulator using coupled-magnetic-core inductors on silicon interposer. IEEE Journal of Solid-State Circuits. 2013 Jan 1;48(1):244–254.

Published In

IEEE Journal of Solid-State Circuits

DOI

ISSN

0018-9200

Publication Date

January 1, 2013

Volume

48

Issue

1

Start / End Page

244 / 254

Related Subject Headings

  • Electrical & Electronic Engineering
  • 4009 Electronics, sensors and digital hardware
  • 1099 Other Technology
  • 0906 Electrical and Electronic Engineering
  • 0204 Condensed Matter Physics