Journal articleJournal of Applied Electrochemistry · August 1, 2026
Electrochemical disinfection holds promise in meeting the needs of decentralized wastewater treatment. Magneli phase titanium sub-oxide, or Ebonex, and its use as an unmodified electrochemical disinfection electrode are studied. Anodic and cathodic potenti ...
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Journal articleCarbon · July 31, 2026
In this work, vertically aligned graphenated carbon nanotubes (g-CNTs) were synthesized by a single-step microwave plasma-enhanced chemical vapor deposition process on Si substrates. The density of graphene foliates was tuned by controlling the growth time ...
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Journal articleEnergy Technology · February 1, 2026
In this work, nanocomposites of graphenated carbon nanotubes (g-CNTs) conformally coated with TiO2 by atomic layer deposition (ALD) were produced. g-CNT forests were grown on silicon substrates by microwave plasma–enhanced chemical vapor deposit ...
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Journal articleApplied Surface Science · December 15, 2025
X-ray photoelectron spectroscopy (XPS) has been used extensively to characterize the surface chemistry of oxide-terminated III-V semiconductors. Herein, we show that during the continuous, uninterrupted acquisition of the photoelectron spectra of native ox ...
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Journal articleSpectrochimica Acta Part B Atomic Spectroscopy · September 1, 2025
Ion energy distributions generated by pulsed laser interactions with materials are essential for applications ranging from materials science to oncology. Ion energy characterization is particularly important for an emerging mass spectrometry technique call ...
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Journal articleGreen Analytical Chemistry · June 1, 2025
In situ measurements of the spatiotemporal distribution of dissolved gases in the ocean are useful for a wide variety of applications including monitoring biogeochemical cycles (e.g., methane, oxygen, and carbon dioxide fluxes), detecting pollutants, study ...
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Journal articleRapid communications in mass spectrometry : RCM · May 2025
RationaleHigher resolution in fieldable mass spectrometers (MS) is desirable in space flight applications to enable resolving isobaric interferences at m/z < 60 u. Resolution in portable cycloidal MS coupled with array detectors could be improved ...
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Journal articleJournal of Energy Storage · May 1, 2025
This article has been retracted: please see Elsevier Policy on Article Withdrawal (https://www.elsevier.com/about/policies/article-withdrawal). This article has been retracted at the request of the Editor-in-Chief. The corresponding author, Dr Atiq ur Rehm ...
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Journal articleInternational Journal of Mass Spectrometry · January 1, 2025
Mass spectrometers are essential instruments for in situ analysis of planetary materials. Ideally, a space flight mass spectrometer would have a mass range from ∼10 u to at least 500 u to enable analysis of organic molecules to aid in searching for the req ...
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Journal articleNuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · July 1, 2024
In this work we describe how a novel mass spectrometer design we recently reported on can be utilized as an electron spectrometer having excellent resolution and passband width. This new electron spectrometer is referred to as a segmented electrode electro ...
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Journal articleJournal of the American Society for Mass Spectrometry · May 2024
Spatial aperture coding is a technique used to improve throughput without sacrificing resolution both in optical spectroscopy and sector mass spectrometry (MS). Previous work demonstrated that aperture coding combined with a position-sensitive array detect ...
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Journal articleJournal of Energy Storage · February 15, 2024
Three spinel ferrites, AgFe2O4, CoFe2O4, and ZnFe2O4, were successfully synthesized using the hydrothermal technique and were employed as electrode materials for supercapacitor applications. ...
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Journal articleMicromachines · April 2023
This paper demonstrates a fully integrated vacuum microelectronic NOR logic gate fabricated using microfabricated polysilicon panels oriented perpendicular to the device substrate with integrated carbon nanotube (CNT) field emission cathodes. The vacuum mi ...
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Journal articleApplied Physics A Materials Science and Processing · January 1, 2023
The interaction of light with the bipolar characteristics of two-terminal devices synthesized with ZnO film is investigated. Three types of devices are built. The first set consisted of devices with n-ZnO film on SiO2/Si or sapphire substrate. T ...
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Journal articleJournal of mass spectrometry : JMS · July 2022
With the advent of technologies such as ion array detectors and high energy permanent magnet materials, there is renewed interest in the unique focusing properties of the cycloidal mass analyzer and its ability to enable small, high-resolution, and high-se ...
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Journal articleInternational Journal of Mass Spectrometry · December 1, 2021
This work demonstrates a novel approach to mass spectrometry using the “virtual-slit” created by the small, localized volume from which ions are generated by localized ionization techniques such as laser ionization of particles and surfaces, and spark ioni ...
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Journal articleAnalytical chemistry · August 2021
In 1938, Walker Bleakney and John A. Hipple first described the cycloidal mass analyzer as the only mass analyzer configuration capable of "perfect" ion focusing. Why has their geometry been largely neglected for many years and how might it earn a respecta ...
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Journal articleJournal of the American Society for Mass Spectrometry · February 2021
Cycloidal sector mass analyzers have, in principle, perfect focusing due to perpendicularly oriented uniform electric and magnetic fields, making them ideal candidates for incorporation of spatially coded apertures. We have previously demonstrated a proof- ...
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Journal articleAdvanced Materials Technologies · January 1, 2021
Stretchable supercapacitors (SCs) have attracted significant attention in developing power-independent stretchable electronic systems due to their intrinsic energy storage function and unique mechanical properties. Most current SCs are generally limited by ...
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Journal articleInternational Journal of Mass Spectrometry · November 1, 2020
This work compares the coded aperture imaging performance of thermionic filament and carbon nanotube (CNT) field emitter-based electron sources in cycloidal-coded aperture mass spectrometers. The use of spatially coded apertures in mass spectrometry enable ...
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Journal articleInternational Journal of Mass Spectrometry · September 1, 2020
Previous works experimentally demonstrated that the application of spatially-coded apertures to simple sector mass spectrographs can result in increased signal intensity while maintaining spectral resolution comparable to that of a conventional slit apertu ...
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Journal articleJournal of Vacuum Science and Technology B · July 1, 2020
High-current electron field emitters are of interest for many applications, but state-of-the-art devices suffer from limitations such as high turn-on macroscopic field, low macroscopic current density, poor emission stability, and short lifetime. Field emi ...
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Journal articleMatter · May 6, 2020
Stretchable supercapacitors based on vertically aligned nanotubes or nanowires have attracted considerable attention because of their improved robustness and electrochemical performance under large and repeated deformations. Here, we demonstrate a robust a ...
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Journal articleACS nano · March 2020
The development of stretchable electronics requires the invention of compatible high-performance power sources, such as stretchable supercapacitors and batteries. In this work, two-dimensional (2D) titanium carbide (Ti3C2Tx
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Journal articleCrystals · March 1, 2020
In this work, resonant infrared matrix-assisted pulsed laser evaporation (RIR-MAPLE), a novel deposition technique, was used to produce a transparent composite electrode of polyflourene (PFO) and two-dimensional (2D) Ti3C2Tx nanosheets, which are part of t ...
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Journal articleAdvanced Energy Materials · June 12, 2019
Stretchable supercapacitors have received increasing attention due to their broad applications in developing self-powered stretchable electronics for wearable electronics, epidermal and implantable electronics, and biomedical devices that are capable of su ...
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Journal articleJournal of applied electrochemistry · January 2019
AbstractWe report the development of novel modes of operation for electrochemical disinfection of E. coli in human urine simulant with an aim to minimize the energy required for disinfection. The system employs boron-doped diamond electrode ...
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Journal articleChem · October 11, 2018
Electron-transport-layer-free (ETL-free) device architectures are promising designs for perovskite photovoltaics because they offer simpler configurations, low cost, and convenience for versatile optoelectronics. However, the development of ETL-free photov ...
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Journal articleChemistry of Materials · September 11, 2018
Cu2BaSn(S,Se)4 (CBTSSe) has recently gained substantial attention as an alternative absorber material for photovoltaic (PV) and photoelectrochemical (PEC) applications due to the abundance of the constituent elements, a large absorpti ...
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Journal articleWater research · September 2018
Electrochemical disinfection (ECD) has become an important blackwater disinfection technology. ECD is a promising solution for the 2 billion people without access to conventional sanitation practices and in areas deficient in basic utilities (e.g., sewers, ...
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Journal articleJournal of the American Society for Mass Spectrometry · February 2018
Despite many potential applications, miniature mass spectrometers have had limited adoption in the field due to the tradeoff between throughput and resolution that limits their performance relative to laboratory instruments. Recently, a solution to this tr ...
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Journal articleJournal of the American Society for Mass Spectrometry · February 2018
Cycloidal mass analyzers are unique sector mass analyzers as they exhibit perfect double focusing, making them ideal for incorporating spatial aperture coding, which can increase the throughput of a mass analyzer without affecting the resolving power. Howe ...
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Journal articleACS Energy Letters · January 12, 2018
The Cu2BaSnS4-xSex (CBTSSe) system has attracted remarkable attention as an emerging chalcogenide semiconductor with desirable electronic and optical properties for solar energy conversion applications. The current study co ...
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Journal articleInternational Journal of Mass Spectrometry · November 1, 2017
The use of microelectromechanical systems (MEMS) components in miniature mass spectrometers is particularly attractive due to their small size and scalable manufacturing capability. Our group has pioneered the development of miniature electron ionization s ...
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Journal articleEnergy and Environmental Science · November 1, 2017
Perovskite photovoltaics have attracted remarkable attention recently due to their exceptional power conversion efficiencies (PCE). State-of-the-art perovskite absorbers typically require thermal annealing steps for high film quality. However, the annealin ...
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Journal articleAnnual review of analytical chemistry (Palo Alto, Calif.) · June 2017
The use of coded apertures in mass spectrometry can break the trade-off between throughput and resolution that has historically plagued conventional instruments. Despite their very early stage of development, coded apertures have been shown to increase thr ...
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Journal articleACS applied materials & interfaces · May 2017
This work investigates the surface chemistry of H2O2 generation on a boron-doped ultrananocrystalline diamond (BD-UNCD) electrode. It is motivated by the need to efficiently disinfect liquid waste in resource constrained environments ...
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Journal articleCarbon · March 1, 2017
The growth of carbon nanotubes (CNTs) on polycrystalline silicon substrates was studied to improve the design of CNT field emission sources for microelectromechanical systems (MEMS) applications and vacuum microelectronic devices (VMDs). Microwave plasma-e ...
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Journal articleJournal of Physical Chemistry C · February 23, 2017
Hybrid organic-inorganic compounds are receiving increasing attention for photoelectrochemical (PEC) devices due to their high electron transport efficiency and facile synthesis. Biosynthesis is a potentially low-cost and eco-friendly method to precipitate ...
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Journal articleThe journal of physical chemistry letters · November 2016
Cu2BaSnS4-xSex films consisting of earth-abundant metals have been examined for photocathode application. Films with different Se contents (i.e., Cu2BaSnS4-xSex with x ≤ 2.4) were synthesize ...
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Journal articleIEEE Transactions on Electron Devices · September 1, 2016
The movement from discrete transistors to integrated silicon circuits led to the rapid evolution of microscale electronics, but there has been no equivalent transition for the vacuum tube transistor. Difficulty integrating devices at microscales has hinder ...
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Journal articleJournal of the American Society for Mass Spectrometry · April 2016
In order to minimize losses in signal intensity often present in mass spectrometry miniaturization efforts, we recently applied the principles of spatially coded apertures to magnetic sector mass spectrometry, thereby achieving increases in signal intensit ...
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Journal articleJournal of Physical Chemistry C · November 19, 2015
Due to their nanoscale dimensions, nanomaterials possess a very high specific surface area, which directly informs their properties in energy conversion and storage and catalytic chemical transformation, among other applications. However, common laboratory ...
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Journal articleJournal of the American Society for Mass Spectrometry · November 2015
A novel chemical ionization (CI) source has been developed based on a carbon nanotube (CNT) field emission electron source. The CNT-based electron source was evaluated and compared with a standard filament thermionic electron source in a commercial explosi ...
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Journal articleAdvanced science (Weinheim, Baden-Wurttemberg, Germany) · October 2015
A mentoring guide for incoming graduate students has been developed to minimize the time spent reiterating general guidance and "norms" that need to be instilled in new graduate students. This allows principal investigators and senior researchers to ...
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Journal articleJournal of the American Society for Mass Spectrometry · September 2015
Miniaturizing instruments for spectroscopic applications requires the designer to confront a tradeoff between instrument resolution and instrument throughput [and associated signal-to-background-ratio (SBR)]. This work demonstrates a solution to this trade ...
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Journal articleNanoscale · July 28, 2015
Correction for 'Enhanced photoelectrochemical water oxidation via atomic layer deposition of TiO2 on fluorine-doped tin oxide nanoparticle films' by Isvar A. Cordova, et al., Nanoscale, 2015, 7, 8584-8592. ...
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Journal articleMRS Communications · June 1, 2015
Nanostructured carbon materials, especially activated carbon, carbon nanotubes, and graphene, have been widely studied for supercapacitor applications. To maximize the efficacy of these materials for electrochemical energy storage, a detailed understanding ...
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Journal articleNanoscale · May 14, 2015
TiO2 is an exemplary semiconductor anode material for photoelectrochemical (PEC) water-splitting electrodes due to its functionality, long-term stability in corrosive environments, nontoxicity, and low cost. In this study, TiO2 photoa ...
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Journal articleChemistry of Materials · April 14, 2015
Graphenated carbon nanotubes (g-CNTs) were investigated as the electrode support in MnO2 composite cathodes for aqueous asymmetric supercapacitors. The electrode performance could be tuned by optimizing the density of graphene foliates on the g- ...
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Journal articleJournal of the American Society for Mass Spectrometry · February 2015
In mass spectrometer design, there has been a historic belief that there exists a fundamental trade-off between instrument size, throughput, and resolution. When miniaturizing a traditional system, performance loss in either resolution or throughput would ...
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Journal articleJournal of the Electrochemical Society · January 1, 2015
Diamond has long been of interest as a biomaterial due to its expected biocompatibility and chemical stability. Progress in surface functionalization of diamond and diamond electrochemistry has extended this interest to use as a biosensor platform. The sen ...
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Journal articleElectrochemistry communications · November 2014
We report the first study of the electrochemical reactivity of a graphenated carbon nanotube (g-CNT) film. The electron transfer kinetics of the ferri-ferrocyanide couple were examined for a g-CNT film and compared to the kinetics to standard carbon nanotu ...
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Journal articleJournal of the American Society for Mass Spectrometry · July 2014
Conventionally, quadrupole ion trap mass spectrometers eject ions of different mass-to-charge ratio (m/z) in a sequential fashion by performing a scan of the rf trapping voltage amplitude. Due to the inherent sparsity of most mass spectra, the detector mea ...
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Journal articleThe journal of physical chemistry. C, Nanomaterials and interfaces · July 2014
Insights into the growth of high edge density carbon nanostructures were achieved by a systematic parametric study of plasma-enhanced chemical vapor deposition (PECVD). Such structures are important for electrode performance in a variety of applications su ...
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Journal articleJournal of the American Chemical Society · June 4, 2014
Nitrogen-doped carbon nanotubes are selective and robust electrocatalysts for CO2 reduction to formate in aqueous media without the use of a metal catalyst. Polyethylenimine (PEI) functions as a co-catalyst by significantly reducing catalytic ov ...
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Journal articleDiamond and related materials · February 2014
In summary, MWCNTs have been examined for a variety of electronic applications due to their unique structure and chemistry. Electrodes for field emission, energy and sensor applications hold particular interest. MWCNTs provide a very high surface area, rel ...
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Journal articleJournal of the Electrochemical Society · January 1, 2014
We report the development of an electrochemical disinfection system for human urine, which does not require the addition of any external water or chemical reagents. It is designed to minimize energy consumption so that it may be powered from point-of-use s ...
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Journal articleNano letters · April 2013
Photoelectrochemical (PEC) water splitting and solar fuels hold great promise for harvesting solar energy. TiO2-based photoelectrodes for water splitting have been intensively investigated since 1972. However, solar-to-fuel conversion efficiencies of TiO2 ...
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Journal articleEcs Transactions · January 1, 2013
We report the development of an electrochemical disinfection system for human urine, which does not require the addition of any external water or chemical reagents. It is designed to minimize energy consumption so that it may derive its energy from solar p ...
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Journal articleEnvironmental Division 2013 - Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future · 2013Cite
Journal articleFuels and Petrochemicals Division 2013 - Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future · 2013Cite
Journal articleJournal of Physical Chemistry C · September 13, 2012
Vertically aligned carbon nanotube (VACNT) films were synthesized and investigated in vitro for their potential use as a neural stimulation electrode. Materials and electrochemical (EC) characterization (cyclic voltammetry, electrochemical impedance spectr ...
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Journal articleIEEE Electron Device Letters · August 27, 2012
Vacuum microelectronic devices (VMDs) designed for bipolar charge operation hold great promise for applications in radiation-intensive and high-temperature environments. This novel class of devices was first realized in a microelectromechanical platform le ...
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Journal articleJournal of Materials Research · April 14, 2012
Graphene and carbon nanotubes (CNTs) are fascinating materials, both scientifically and technologically, due to their exceptional properties and potential use in applications ranging from high-frequency electronics to energy storage devices. This manuscrip ...
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Journal articleDiamond and Related Materials · March 1, 2012
Nanostructured carbons offer great promise in numerous electrode applications due to their high surface area and area specific capacitance. With the growing importance of energy applications in particular, a need has emerged to characterize the various for ...
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Journal articleJournal of Vacuum Science and Technology A Vacuum Surfaces and Films · January 1, 2012
Clean renewable energy sources (e.g., solar, wind, and hydro) offers the most promising solution to energy and environmental sustainability. On the other hand, owing to the spatial and temporal variations of renewable energy sources, and transportation and ...
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Journal articleApplied Physics Letters · October 2011
This letter reports on nucleation and growth of graphene foliates protruding from the sidewalls of aligned carbon nanotubes (CNTs) and their impact on the electrochemical double-layer capacitance. Arrays of CNTs were grown for different time intervals, res ...
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Journal articleMicrofluidics and Nanofluidics · February 1, 2011
Gas flows over a wide range of Knudsen numbers (~0.5-10) are studied using silicon nanochannel arrays with slit-shaped pores. The pore sizes of the silicon nanochannel arrays range from micrometer to sub-10-nm scales. The flows are generated under conditio ...
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Journal articleNanotechnology 2009 Fabrication Particles Characterization MEMS Electronics and Photonics Technical Proceedings of the 2009 Nsti Nanotechnology Conference and Expo Nsti Nanotech 2009 · November 26, 2009
Al-doped ZnO (ZnO:Al) thin films were deposited on glass substrates using the radio frequency reactive magnetron sputtering technique. The effects of Al concentrations and oxygen partial pressures on the microstructurc and the luminescence properties of th ...
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Journal article2008 IEEE International Vacuum Electronics Conference Ivec with 9th IEEE International Vacuum Electron Sources Conference Ivesc · September 15, 2008
We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 μm-thick silicon dioxide layer to the device. The device is fabricated ...
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Journal articleJournal of the Electrochemical Society · July 11, 2008
A better understanding of the effects of alloying Pt with Au on the oxygen reduction reaction (ORR) was achieved in this study. Recent investigations of carbon-supported Au-Pt nanoparticle catalysts have shown enhanced response for the ORR with respect to ...
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Journal articleApplied Physics Letters · June 2008
We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 mu m thick silicon dioxide layer to the device. The device is fabricat ...
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Journal articleJournal of Materials Research · May 1, 2008
Thick SiOxNy films were deposited by radiofrequency (rf) plasma chemical vapor deposition using silane (SiH4) and nitrous oxide (N2O) source gases. The influence of deposition conditions of gas flow ratio, rf pla ...
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Journal articleJournal of Technology Transfer · February 1, 2008
This paper examines intellectual property (IP) management in U.S. companies and addresses three questions: What are typical sources of IP? How do companies manage IP? What role do donations of IP play in IP management? We used in-depth interviews and an on ...
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Journal articleProceedings of IEEE Sensors · December 1, 2007
Due to its flexibility and sensitivity, mass spectrometry is a preferred sensing method for applications ranging from explosives detection to air quality monitoring. The key functional elements of a mass spectrometer are ionization, mass separation, and io ...
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Journal articleAmerican journal of physiology. Renal physiology · October 2007
Polydisperse Ficoll mixtures have been used to explore glomerular sieving. Ficoll appears to be neither absorbed nor secreted by the renal tubule, and so urinary Ficoll concentrations reflect only the glomerular filtration barrier. The literature is contra ...
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Journal articleThin Solid Films · May 7, 2007
Nanocomposite tantalum carbide/amorphous hydrocarbon (TaC/a-C:H) thin film composition, structure, and mechanical properties depend on the direct current bias voltage (Vb) level applied to the substrate during reactive sputter deposition. A set ...
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Journal articleApplied Physics Letters · March 2007
A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The el ...
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Journal articleJournal Of Vacuum Science \& Technology A · 2007
The authors demonstrate a new technique for high sensitivity gas permeation measurements by integrating mass spectrometry with programed accumulation, detection, and evacuation of permeant. After passing through the film of interest, the gas permeant is ca ...
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Journal articleJournal of Microelectronics and Electronic Packaging · January 1, 2007
The miniaturization of analytical instruments and packaging of novel sensors is an area that has attracted significant research interest and offers many opportunities for product commercialization. Electrochemical sensors have been used to detect a wide va ...
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Journal articleEcs Transactions · January 1, 2007
Co-sputtering was utilized to form metastable solid solution Au/Pt alloy films across the entire range of possible compositions. Homogeneous mixing was achieved without nanoparticle geometries, thereby isolating the effects of alloying from nanoscale size ...
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Journal articleProceedings Electronic Components and Technology Conference · December 22, 2006
The miniaturization of analytical instruments and packaging of novel sensors is an area that has attracted significant research interest and offers many opportunities for product commercialization. Low Temperature Co-fired Ceramics (LTCC) is a materials sy ...
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Journal article2006 IEEE International Vacuum Electronics Conference Held Jointly with 2006 IEEE International Vacuum Electron Sources Ivec Ivesc 2006 · December 1, 2006
Previously, Bower et al. [1] demonstrated a microfabricated vacuum microtriode with an integrated carbon nanotube field emission cathode. One of the main limitations of the microtriode was the inadequate device insulation which suffered from leakage curren ...
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Journal articleImaps Acers 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies Cicmt 2006 · December 1, 2006
The miniaturization of analytical instruments and packaging of novel sensors is an area that has attracted significant research interest and offers many opportunities for product commercialization. Electrochemical sensors have been used to detect a wide va ...
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Journal articleMRS Bulletin · September 1, 2006
The joint International Conference on New Diamond Science and Technology and the Applied Diamond Conference (ICNDST & ADC 2006) was held in Research Triangle Park, North Carolina. The joint conference brought together more than 230 researchers from 18 coun ...
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Journal articleJournal of Materials Research · June 1, 2006
Hardness, elastic modulus, and stress directly influence the ability of tantalum carbide/amorphous hydrocarbon (TaC/a-C:H) thin films to enhance the wear-resistance of steel tribological component surfaces. Designed factorial experiments enabled an evaluat ...
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Journal articleMaterials Research Society Symposium Proceedings · December 19, 2005
The importance of silicon oxynitride (SiOxNy) for optoelectronic device applications is ever increasing owing to its tunable refractive index. In this research, the influence of deposition conditions on film properties, correlated wit ...
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Journal articleJournal of Electronic Materials · December 2005
The various crystallographic forms of boron nitride (BN) are of great technological interest because of their demonstrated tribological, high-temperature, thermally conducting, electrically insulating, and wide-bandgap semiconductor properties. Unfortunate ...
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Journal articleApplied Physics Letters · December 1, 2005
Silicon oxynitride films were deposited using a plasma-enhanced chemical vapor deposition process. The bond configurations of the constituent atoms in the deposited film were analyzed using x-ray photoelectron spectroscopy. Analysis of the Si 2p spectra sh ...
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Journal articleMaterials Research Society Symposium Proceedings · December 1, 2005
With the continued growth of photonics, silicon oxynitride (SiO xN y) is becoming a popular material for optoelectronic applications owing to its large tunable refractive index. However, with the increase in refractive index, these fi ...
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Journal articleJournal of Materials Research · September 1, 2005
The properties of nanocomposite tantalum carbide/amorphous hydrocarbon (TaC/a-C:H) thin films depend closely on reactive magnetron sputtering deposition process conditions. The chemical composition and structure trends for TaC/a-C:H films were obtained as ...
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Journal articleJournal of Applied Physics · July 1, 2004
The use of radial distribution functions (RDF) for the characterization of amorphous carbon thin films containing silicon and hydrogen (Si-aC:H) was analyzed. The average number of neighbours located a distance r from away from an arbitrary atom in the sam ...
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Journal articleResearch Technology Management · January 1, 2004
The benefit of return in internal Research and Development (R&D) to yield return on physical asset investment is discussed. The R&D is required to generate innovations and to utilize internal knowledge to access ousite technologies. It also provide an abil ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 2004
Tantalum oxide (Ta2O5) films were deposited onto p-type silicon substrates using reactive DC magnetron sputtering, and then annealed for one hour in a dry air ambient at temperatures of 730°C, 780°C, and 830°C. Annealing was shown to ...
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Journal articleResearch Technology Management · January 1, 2003
The relationship between central R&D (CRD) and the business units (BU) was discussed. Each CRD-BU interface was managed by one person who coordinates the specific BU and the various CRD functions that might interact with it. The negotiation process produce ...
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Journal articleSurface and Coatings Technology · August 22, 2002
The objective of this study was to correlate mechanical properties with the structure and chemistry of silicon-incorporated amorphous hydrocarbon (Si-aC:H) films deposited by reactive sputtering. Hardness and elastic modulus were measured via microindentat ...
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Journal articleJournal of Materials Research · January 1, 2002
The friction and wear performance were correlated with the thermal stability of reactively sputtered Si-aC:H thin films containing various Si and H concentrations. The average steady-state friction coefficients as measured by dry sliding pin-on-disk tests ...
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Journal articleAcademy of Management Executive · January 1, 2002
Research and development is becoming increasingly business-oriented, and corporate reliance on new technology and innovation is greater than ever. How can R&D activities be organized to yield the greatest value for the enterprise? A study of 14 leading tec ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 2002
Silicon-incorporated amorphous hydrocarbon (Si-aC:H) films with varying Si contents were deposited onto a Ti interlayer on Si and steel substrates by reactive sputtering in an unbalanced magnetron sputtering system. The objective of this study was to measu ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 1996
(100) and (111) oriented diamond films were grown on similarly oriented single crystal Ni substrates using a multi-step seeding and growth process. In-situ reflection monitoring revealed large surface reflectivity changes upon heating of the seeded substra ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 1996
Transmission electron microscopy (TEM) was used to investigate the interfacial microstructures and phases involved in the nucleation and growth of the oriented diamond on Ni substrates by a multi-step growth process. A molten surface layer is formed during ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 1996
Thin films of (100) oriented CoSi2 have been electron beam evaporated onto Si(100) substrates from a mixed Co-Si target. A sharp c(2×2) low energy electron diffraction (LEED) pattern resulted after annealing the films to 800 °C. Extended x-ray a ...
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Journal articleJournal of Applied Physics · December 1, 1995
The carbide forming nature of the substrate appears to be an important property when performing bias-enhanced nucleation (BEN); therefore, various refractory metals were studied since they are known carbide formers. Nucleation densities approaching 1×10
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Journal articleSurface Science · July 10, 1995
We carried out experimental and theoretical studies aimed at probing interface interactions of diamond with Si, Ni, and Ni3Si substrates. Oriented diamond films deposited on (100) silicon were characterized by polar Raman, polar XRD, and cross-s ...
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Journal articleThin Solid Films · June 1, 1995
The influence of the process parameters on bias-enhanced nucleation of diamond on silicon was studied. When low pressures (< 15 Torr) and/or high bias voltages (more than 350 V d.c.) were used, no significant diamond nucleation was observed; in some cases ...
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Journal articleJournal of Materials Research · June 1995
Diamond deposition on group VIII transition metals of Cr, Mn, Fe, Co, and Ni has been achieved by a multi-step chemical vapor deposition process consisting of (i) seeding the substrate with diamond powders, (ii) annealing the seeded substrate in hydrogen a ...
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Journal articleJournal of Vacuum Science and Technology B Microelectronics and Nanometer Structures · March 1, 1995
Single crystal silicon field emitters have been modified by surface deposition of diamond using bias-enhanced microwave plasma chemical vapor deposition. Polycrystalline diamond with a high nucleation density (1010/cm2) and small grai ...
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Journal articleJournal of Applied Physics · January 1, 1995
Nucleation of oriented diamond particles on cobalt substrates has been achieved by a multistep, hot-filament chemical vapor deposition process, which involves seeding, annealing, nucleation, and then growth. The substrates were seeded with either diamond p ...
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Journal articleJournal of Applied Physics · January 1, 1995
This paper discusses the growth of diamond thin films using an enclosed oxyacetylene torch operating at 700 Torr. Using response surface methodologies, we have systematically explored the parameter space to construct maps of nucleation density, film qualit ...
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Journal articleJournal of Materials Research · January 1, 1995
This paper describes a process for uniformly enhancing the nucleation density of diamond films on silicon (Si) substrates via dc-biased hot filament chemical vapor deposition (HFCVD). The Si substrate was negatively biased and the tungsten (W) filaments we ...
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Journal articleApplied Physics Letters · January 1, 1995
A planar radio frequency inductively coupled plasma has been used to deposit diamond onto scratched silicon. This plasma source has been developed recently for use in large area semiconductor processing and holds promise as a method for scale up of diamond ...
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Journal articleApplied Physics Letters · December 1, 1994
Polycrystalline diamond thin films have been formed on single crystal silicon field emitters using bias-enhanced nucleation in a microwave plasma chemical vapor deposition system. A diamond nucleation density greater than 1010/cm2 wit ...
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Journal articleJournal of Applied Physics · December 1, 1994
Raman and various photoluminescence (PL) techniques were employed to investigate the role of nitrogen doping on the optical spectra of chemical-vapor-deposited (CVD) diamond films and to determine the origin of the characteristic broadband luminescence whi ...
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Journal articleDiamond and Related Materials · January 1, 1994
The effect of native oxide thickness on the nucleation of diamond was investigated. The initial thickness of the native oxide on Si substrates was varied using three surface treatment methods: ultrasonic scratching, HF acid etching, and a combination of th ...
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Journal articleDiamond and Related Materials · January 1, 1994
Diamond has been deposited on polycrystalline copper substrates via bias-enhanced nucleation, a pre-treatment technique to promote nucleation in which a negative potential is applied to the substrate. The maximum nucleation density of the diamond on the co ...
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Journal articleJournal of Materials Research · January 1, 1994
Oriented diamond films have been nucleated on single crystal nickel substrates seeded with non-diamond carbon and annealed at high temperatures in atomic hydrogen. The non-diamond carbon seeds included graphite powders, fullerene (60) powders, and gaseous ...
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Journal articleJournal of Materials Research · January 1, 1994
Highly oriented diamond thin films grown on silicon via microwave plasma chemical vapor deposition were examined by transmission electron microscopy. In the plan view, defects appearing at the grain boundary were easily observed. (100) faceted grains that ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 1994
This research investigates the growth of diamond thin films using an enclosed oxyacetylene torch. Using statistical experimental design, we have systematically explored the parameter space to construct maps of nucleation density, film quality, and growth r ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 1994
Micro- and macro-photoluminescence techniques were employed in this research to investigate the role of nitrogen-doping on the optical spectra of chemical vapor deposited diamond films and to determine whether the origin of the broadband luminescence is du ...
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Journal articleMaterials Research Society Symposium Proceedings · January 1, 1994
Diamond nucleation has been investigated on a variety of potential heteroepitaxial substrate materials. Previous work in this laboratory has demonstrated heteroepitaxial nucleation on both Si and SiC substrates via bias-enhanced nucleation (BEN). In this s ...
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Journal articleJournal of Applied Physics · December 1, 1993
Photoluminescence and Raman spectroscopy are employed to explore the time evolution of defect formation in chemical vapor deposition diamond films for stages of growth spanning nucleation to continuous film formation. Our research is concentrated on three ...
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Journal articleApplied Physics Letters · December 1, 1993
Oriented diamond nuclei prepared by bias-enhanced microwave plasma chemical vapor deposition on β-SiC and Si were characterized by x-ray texture diffractometry. In both cases, x-ray pole figures reveal an epitaxial relation between the orientation of diamo ...
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Journal articleApplied Physics Letters · December 1, 1993
Ordered diamond films have been deposited on single-crystal silicon substrates via an in situ carburization followed by bias-enhanced nucleation. Textured diamond films with greater than 50% of the grains oriented D(100)//Si(100) and D〈110〉//Si〈110〉 were g ...
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Journal articleJournal of Applied Physics · December 1, 1993
Schottky barrier formation of metal contacts deposited on diamond (111) and (100) surfaces was investigated. Three different metals (Au, Al, and Ti) were studied because of their different chemical reactivity with C, i.e., Au being a nonreactive metal, Al ...
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Journal articleApplied Physics Letters · December 1, 1993
A previously reported multistep hot filament chemical vapor deposition process for nucleating diamond directly on nickel substrates has been further refined to increase the nucleation density and improve the orientation of diamond films. The process employ ...
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Journal articleDiamond and Related Materials · April 13, 1993
CVD diamond thin-film thermistors have been fabricated in various geometries and at different doping levels in an effort to achieve practical resistance-vs.-temperature characteristics. Typical activation energy values reported for polycrystalline films we ...
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Journal articleDiamond and Related Materials · April 1, 1993
CVD diamond thin-film thermistors have been fabricated in various geometries and at different doping levels in an effort to achieve practical resistance-vs.-temperature characteristics. Typical activation energy values reported for polycrystalline films we ...
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Journal articleDiamond and Related Materials · March 31, 1993
A computer-controlled oxy-acetylene torch was used to nucleate and grow polycrystalline diamond films. The computer interface was designed to monitor and/or modify continuously oxygen and acetylene flow rates, while a PID temperature controller was used to ...
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Journal articleDiamond and Related Materials · March 31, 1993
Diamond has been successfully nucleated on mirror finish single-crystal β-SiC films via bias-enhanced microwave plasma chemical vapor deposition. Initial scanning electron microscopy indicated that approximately 50% of the diamond grains were oriented rela ...
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Journal articleJournal of Crystal Growth · March 2, 1993
This paper reports the successful growth of optically transparent, individual diamond crystals up to millimeter diameters on silicon substrates by oxygen-acetylene combustion flames at atmospheric pressure. The growth process consisted of three steps: (i) ...
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Journal articleDiamond and Related Materials · March 1, 1993
A theoretical study of the diamond-β-SiC heteroepitaxial interface has been conducted. The interfacial modeling was performed to examine the various combinations of like and unlike interfacial planes between diamond and β-SiC based on a geometric criterion ...
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Journal articleDiamond and Related Materials · March 1, 1993
A computer-controlled oxy-acetylene torch was used to nucleate and grow polycrystalline diamond films. The computer interface was designed to monitor and or modify continuously oxygen and acetylene flow rates, while a PID temperature controller was used to ...
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Journal articleDiamond and Related Materials · February 26, 1993
TiC contacts on B-doped polycrystalline diamond were studied. The as-deposited TiC formed rectifying contacts with a reverse leakage current of 0.4 μA at 5 V. After the contacts had been annealed at 850 C at a vacuum of approximately 1 × 10-8 To ...
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Journal articleDiamond and Related Materials · 1993
A theoretical study of the diamond-β-SiC heteroepitaxial interface has been conducted. The interfacial modeling was performed to examine the various combinations of like and unlike interfacial planes between diamond and β-SiC based on a geometric ...
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Journal articleDiamond and Related Materials · 1993
Three different metals (Au, Al and Ti) were deposited on polycrystalline diamond films. The effects of post-deposition annealing and pre-deposition Ar+ sputtering were examined. Au and Al did not chemically interact with diamond and formed rectifying conta ...
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Journal articleDiamond and Related Materials · 1993
Diamond has been successfully nucleated on mirror finish single-crystal β-SiC films via bias-enhanced microwave plasma chemical vapor deposition. Initial scanning electron microscopy indicated that approximately 50% of the diamond grains were oriented ...
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Journal articleJournal of Materials Research · January 1, 1993
A seeding and multistep deposition process has been developed to nucleate and grow diamond films directly on Ni substrates in a hot filament chemical vapor deposition system. High quality diamond films have been deposited without graphite codeposition on b ...
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Journal articleJournal of Applied Physics · December 1, 1992
The results of in vacuo x-ray photoelectron spectroscopy and Auger electron spectroscopy of Al-diamond interfaces for Al overlayer thicknesses up to 10 Å are presented. Postdeposition annealing effects up to 430°C are also discussed. Ex situ current-voltag ...
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Journal articleApplied Physics Letters · December 1, 1992
Textured diamond films have been deposited on β-SiC via microwave plasma chemical vapor deposition preceded by an in situ bias pretreatment that enhances nucleation. Approximately 50% of the initial diamond nuclei appear to be aligned with the C(001) plane ...
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Journal articleThin Solid Films · May 15, 1992
The formation of closely spaced selected area ohmic and rectifying contacts on a given semiconductor surface is of fundamental interest for the fabrication of transistor type devices. However, it has been observed that the formation of good ohmic or rectif ...
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Journal articleR and D Research and Development Kobe Steel Engineering Reports · April 1, 1992
Diamond films grown by microwave plasma CVD have been examined by Transmission Electron Microscopy (TEM) and High Resolution TEM (HRTEM). It was found that columnar growth of polycrystalline grain structure, twins, stacking faults, dislocations and interme ...
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Journal articlePhysical Review B · January 1, 1992
The gold-polycrystalline-diamond interface has been characterized by x-ray-photoelectron-spectroscopy (XPS), Auger-electron-spectroscopy (AES), and current-voltage (I-V) measurements. The I-V characteristics of gold contacts on polycrystalline diamond were ...
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Journal articleJournal of Electronic Materials · 1992
Electrical conductivity measurements and photoluminescence (PL) were used to study the effects that sample distance from the plasma during growth has on the carrier transport properties of undoped CVD diamond. The films were grown by downstream microwave p ...
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Journal articleDiam. Relat. Mater. (Netherlands) · 1992
The paper reports the surface morphology and structural imperfection of boron-doped diamond films prepared by microwave plasma enhanced chemical vapor deposition. It was found that boron dopants improved the structural quality of diamond films. The surface ...
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Journal articleJournal of Materials Research · January 1, 1992
The role of Si02in nucleation of diamond has been investigated in an oxy-acetylene flame. It was found that growth methods that minimize Si02formation enhance diamond nucleation. A short pretreatment of a scratched Si surface in a low ...
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Journal articleJournal of Materials Research · 1992
Flat, hexagonally shaped diamond platelets were observed during the initial stage of microwave plasma assisted deposition of diamond. The platelets are approximately 2.5 μm in linear dimension and are oriented with their large six-sided faces parallel to t ...
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Journal articleJournal of Materials Research · January 1, 1992
Laser reflection interferometry (LRI) has been shown to be a useful in situ technique for measuring growth rate of diamond during microwave plasma chemical vapor deposition (MPCVD). Current alternatives to LRI usually involve ex situ analysis such as cross ...
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Journal articlePhysical Review B · January 1, 1992
The I-V characteristics of titanium contacts on polycrystalline diamond have been correlated with x-ray-photoelectron-spectroscopy (XPS) and Auger-electron-spectroscopy (AES) characterizations of the interface. As-deposited titanium contacts were rectifyin ...
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Journal articleJournal of Applied Physics · December 1, 1991
Crystal/material quality and electrical properties of B-doped diamond films synthesized by microwave plasma chemical vapor deposition were investigated. Raman spectroscopy verified the presence of diamond and indicated that the crystal quality increased wi ...
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Journal articleJournal of Applied Physics · December 1, 1991
We report the methods and results of a theoretical study of the diamond-cubic boron nitride [BNcub] heteroepitaxial system. We introduce a general, geometric reciprocal space technique for evaluating candidate epitaxial configurations, and a nov ...
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Journal articleJournal of Applied Physics · December 1, 1991
The surface topography of silicon substrates after the initial stages of diamond growth, by microwave plasma enhanced chemical vapor deposition, has been observed by scanning tunneling microscopy. The initial surfaces were polished with diamond paste befor ...
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Journal articleApplied Physics Letters · December 1, 1991
The seeding for large-area mosaic diamond films approaching single-crystal quality is described. The technique includes patterned etching of relief structures in Si substrates, deposition from a slurry and orientation of macroscopic diamond seed crystals i ...
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Journal articleDiamond and Related Materials · August 15, 1991
The quality of diamond films deposited from the vapor phase was analyzed via transmission electron microscopy. Diamond films grown by different deposition processes and under various conditions were examined and the processing microstructure relationships ...
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Journal articleSurface and Coatings Technology · January 1, 1991
For the future application of diamond films to microelectronic devices and sensors, it is necessary to develop methods for making patterns a few micrometers wide of diamond films on substrates. To this end, two different methods of selected-area deposition ...
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Journal articleJ. Vac. Sci. Technol. B, Microelectron. Process. Phenom. (USA) · 1991
The surface topography of diamond thin films deposited on silicon have been charted by scanning tunneling microscopy (STM). This study addresses the initial nucleation of diamond growth on Si, and the faceted structure of the diamond films. The results wer ...
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Journal articleProceedings of the IEEE · January 1, 1991
This review concentrates on recent advances in the chemical vapor deposition (CVD) and characterization of diamond films on nondiamond substrates. Major growth techniques including hot filament CVD, microwave, RF or dc plasma enhanced CVD, and combustion f ...
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Journal articleApplied Physics Letters · December 1, 1990
The growth of diamond films on various polycrystalline metal and (001) Si substrates by biased hot-filament chemical vapor deposition is discussed. The deposited films have been characterized by scanning electron microscopy, x-ray diffraction, Auger electr ...
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Journal articleApplied Physics Letters · December 1, 1990
The growth of diamond films on (001) Si substrates by bias-controlled chemical vapor deposition is described. The film quality as judged by Raman spectroscopy and scanning electron microscopy depends strongly on the biasing conditions. Under low current re ...
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Journal articleJournal of Crystal Growth · January 1, 1990
Diamond is an excellent candidate material for use in selected electronic and wear resistant coating applications due to its superior hardness, strength and thermal conductivity as well as its high electron drift velocity, chemical and thermal stability, r ...
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Journal articleJournal of Crystal Growth · 1990
In this research, diamond thin films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced chemical vapor deposition (CVD) have been examined by various transmission electron microscopy (TEM) techniques including bright and da ...
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Journal articleJournal of Materials Research · 1990
Diamond films grown by Bias-Controlled Hot Filament Chemical Vapor Deposition (BCCVD) on silicon (Si) substrates were characterized by Transmission Electron Microscopy (TEM). Both plan-view and cross-sectional TEM samples were made from diamond films grown ...
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Journal articleJournal of the American Ceramic Society · January 1, 1990
Defects present in β‐SiC thin films epitaxically grown on hexagonal 6Hα‐SiC substrates via chemical vapor deposition have been characterized by transmission electron microscopy. These defects are different from those previously observed in β‐SiC films grow ...
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Journal articleJournal of Materials Research · January 1, 1990
Thin carbon films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced CVD have been examined by electron microscopy. Previously reported transmission electron microscopy (TEM) of the diamond films1 has shown that ...
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Journal articlePhysical Review B · January 1, 1990
Diamond and diamondlike thin films produced by various chemical-vapor- deposition processes have been examined using Raman spectroscopy. These films exhibit features in the Raman spectra, suggesting that they are composites of crystalline and amorphous dia ...
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Journal articleJournal of the American Ceramic Society · January 1, 1990
The high breakdown electric field, saturated electron drift velocity, and melting (decomposition) point of SiC have given continual impetus to research concerned with the development of thin films having minimum concentrations of line and planar defects an ...
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Journal articleJournal of Electronic Materials · March 1, 1989
The effects of annealing of B or N dual implanted regions in 15-20 Μm thick monocrystalline Β-SiC films has been investigated using cross-sectional TEM, SIMS, Raman spectroscopy, C-V and sheet resistance measurements. Implantation resulted in buried amorph ...
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Journal articleProceedings of SPIE the International Society for Optical Engineering · January 17, 1989
Raman spectroscopy has been used to examine diamond thin films produced by various CVD processes. The Raman spectra exhibit features which suggest that the films are composites of diamond (sp3) and graphite-like (sp4) bonding. A brief ...
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Journal articleProceedings of SPIE the International Society for Optical Engineering · January 17, 1989
Polycrystalline diamond films were deposited by the microwave-plasma chemical-vapor-deposition (CVD) on Si substrates using a mixture of methane and hydrogen for the source gas. In the morphology study of diamond films using a scanning electron microscope ...
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Journal articleJournal of Materials Research · January 1, 1989
Beta—SiC thin films have been epitaxially grown on 6H—SiC {0001} substrates via chemical vapor deposition (CVD). The growth rate increased linearly with the source/carrier gas flow rate ratio. The activation energy for the growth of β—SiC grown on the Si f ...
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Journal articleJournal of Materials Research · January 1, 1989
Thin carbon films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced CVD have been examined by Auger electron spectroscopy, secondary ion mass spectrometry, electron and x-ray diffraction, electron energy loss spectroscopy, ...
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Journal articleJournal of the Electrochemical Society · 1989
Phosphoric acid (H3PO4) is the electrolyte used in the most advanced H2/air fuel cell developed for power generation and for on-site integrated energy systems. Oxygen reduction kinetics in this electrolyte are relatively poor and thus limit the efficiency ...
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Journal articleJournal of Applied Physics · December 1, 1988
High-quality, monocrystalline 6H-SiC thin films have been epitaxially grown on 6H-SiC {0001} substrates which were prepared 3°off-axis from 〈0001〉 towards 〈112̄0〉 at 1773 K via chemical vapor deposition (CVD). Essentially, no defects were generated from the ...
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Journal articleJournal of Applied Physics · December 1, 1988
Beta-SiC thin films epitaxially grown on 6H-SiC (0001) substrates were examined via scanning-reflection x-ray topography (XRT) and x-ray rocking curve analysis. The lattice misfit between the (111) plane of the β-SiC epitaxial layer and the (0001) plane of ...
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Journal articleJ. Mater. Res. (USA) · 1988
Antiphase domain-free, monocrystalline β-SiC thin films have been epitaxially grown on off-axis Si (100) substrates. The effects of degree of misorientation and substrate preannealing on the antiphase domain boundaries (APB's) have been investigated. ...
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Journal articleJ. Vac. Sci. Technol. A, Vac. Surf. Films (USA) · 1988
The atomic bonding configurations of carbon bonding in diamond and diamondlike thin films are explored using Raman scattering. The general aspects of Raman scattering from composites are presented. Effects are discussed due to crystalline or amorphous stru ...
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Journal articleJ. Electrochem. Soc. (USA) · 1988
The calculated free energies and electrochemical stability of the PtCr system are presented as well as the calculated free energies of the PtZr, PtTi, and the PtV systems. These alloy systems are currently of interest as fuel cell electrodes providing deal ...
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Journal articleMaterials Science & Engineering B: Solid-State Materials for Advanced Technology · 1988
The deposition of monocrystalline diamond, at or below 1 atm total pressure and at a temperature T<1273 K, has been achieved on diamond substrates; the deposited film has been polycrystalline on all other substrates but the achievement is no less signif ...
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Journal articleProc. SPIE - Int. Soc. Opt. Eng. (USA) · 1988
Diamond is an excellent candidate material for use in electronic and wear resistant coating applications due to its hardness, strength, thermal conductivity, high electron drift velocity, chemical and thermal stability, radiation hardness and optical trans ...
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Journal articleJ. Vac. Sci. Technol. A, Vac. Surf. Films (USA) · 1988
Summary form only given. The authors discuss growth of epitaxial films of β-SiC on high resistivity substrates, using chemical vapour deposition. They study the defects and effects of doping, and manufacture Schottky diodes ...
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Journal articleJournal of the Electrochemical Society · 1988
Ohmic and reftifying electrical contacts to n- or p-type semiconducting beta -SiC thin films were developed and characterized. Upon annealing for 300s at 1523 K, Ni, Au-Ta, and Cr were ohmic on n-type material. TaSi//2, similarly heated to 1123 K, and as-d ...
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Journal articleJ. Vac. Sci. Technol. A, Vac. Surf. Films (USA) · 1988
Summary form only given. Diamond thin films grown by microwave plasma enhanced chemical vapor deposition (MPECVD) were characterized by a variety of materials analysis techniques including scanning electron microscopy (SEM), transmission electron microscop ...
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Journal articleProceedings Electronic Components and Technology Conference · January 1, 1988
High-purity, single-crystal beta -SiC thin films have been epitaxially grown by means of chemical vapor deposition. The defect nature of these films has been characterized, and antiphase boundaries, one of the major defects observed, were eliminated throug ...
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Journal articleApplied Physics Letters · December 1, 1987
Metal-semiconductor field-effect transistors (MESFET's) have been fabricated in an unintentionally doped, n-type β-SiC thin film grown by chemical vapor deposition (CVD). This n-type layer was deposited on a monocrystalline p-type β-SiC (100) CVD layer pre ...
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Journal articleInternational SAMPE Symposium and Exhibition Proceedings · December 1, 1987
High purity monocrystalline β-SiC films have been grown on Si (100) and α-SiC (0001) at 1660K and 0.1 MPa using SiH4 and C2H4 carried in H2. Films produced on Si (100) have also been doped with B or Al (p-type) o ...
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Journal articleJournal of the Electrochemical Society · 1987
The effect of alloying on catalysis, especially with respect to oxygen and the ORR, was examined. A series of PtCr alloys allowed four major aspects of alloying to be investigated: (i) effect of decreasing lattice parameter with increasing Cr content in th ...
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Journal articleProceedings the Electrochemical Society · December 1, 1986
In this investigation, the effect of alloying on catalysis, especially with respect to oxygen and the ORR, was examined. A series of PtCr alloys allowed four major aspects of alloying to be investigated: (i) Effect of decreasing lattice parameter with incr ...
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Journal articleApplied Physics Letters · December 1, 1986
Epitaxial films of cubic β-SiC(111) have been grown via chemical vapor deposition at 1683 K on (0001) substrates of hexagonal 6H α-SiC. Optical microscopy of the surface indicated that a decrease in the ratio of the sum of the C and Si source gases to the ...
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Journal articleMaterials Evaluation · June 1, 1985
The acoustic emission (AE) behavior of three naval alloy steels (HY 80, HY 100, and HY 130) was characterized during tensile elongation and bend-type loading. The detection of emissions was accomplished using a very new, state-of-the-art interferometer sup ...
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