Richard B. Fair

Lord-Chandran Distinguished Professor Emeritus of Engineering

Pierre R. Lamond Department of Electrical and Computer Engineering

Box 90291, Durham, NC 27708-0291

3519 CIEMAS, Dept. of Electrical and Computer Engrg., Durham, NC 27708

Office hours MWF 1:30-3:00pm

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Scholarly Works - Book sections

The role of vacancies and self-interstitials in impurity diffusion in silicon

Book section · January 1, 1984 Research in the areas of self diffusion and dopant diffusion in Si has focused on identifying the specific mechanisms and point defects involved. Recent approaches include observing the effects of diffusion and doping on stacking fault growth or shrinkage, ... Full text Cite