Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing
Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 h. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects. Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in a "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing. © 2005 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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Related Subject Headings
- Materials
- 5104 Condensed matter physics
- 4017 Mechanical engineering
- 4016 Materials engineering
- 0913 Mechanical Engineering
- 0912 Materials Engineering
- 0204 Condensed Matter Physics
Citation
Published In
DOI
ISSN
Publication Date
Volume
Issue
Start / End Page
Related Subject Headings
- Materials
- 5104 Condensed matter physics
- 4017 Mechanical engineering
- 4016 Materials engineering
- 0913 Mechanical Engineering
- 0912 Materials Engineering
- 0204 Condensed Matter Physics