Morphology and microstructure evolution of multilayer Au/Cr/Si thin films subject to annealing

Conference Paper

Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 hours. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects, Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in the "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing. © 2005 Materials Research Society.

Full Text

Duke Authors

Cited Authors

  • Miller, D; Herrmann, C; Maier, H; George, S; Stoldt, C; Gall, K

Published Date

  • January 1, 2004

Published In

Volume / Issue

  • 854 /

Start / End Page

  • 131 - 136

International Standard Serial Number (ISSN)

  • 0272-9172

International Standard Book Number 10 (ISBN-10)

  • 1558998063

International Standard Book Number 13 (ISBN-13)

  • 9781558998063

Digital Object Identifier (DOI)

  • 10.1557/proc-854-u7.5

Citation Source

  • Scopus