OBSERVATION OF OXIDATION-ENHANCED AND -RETARDED DIFFUSION OF ANTIMONY IN SILICON: THE BEHAVIOR OF (111) WAFERS.

Published

Journal Article

Duke Authors

Cited Authors

  • Tan, TY; Ginsberg, BJ

Published Date

  • January 1, 1983

Published In

Volume / Issue

  • 14 /

Start / End Page

  • 141 - 145

International Standard Serial Number (ISSN)

  • 0272-9172

Citation Source

  • Scopus