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Creep of thin film Au on bimaterial Au/Si microcantilevers

Publication ,  Journal Article
Gall, K; West, N; Spark, K; Dunn, ML; Finch, DS
Published in: Acta Materialia
May 3, 2004
Published version (DOI)

We examine creep of thin film Au on curved bimaterial Au/Si microcantilevers. Time-dependent inelastic strains in the Au film lead to gradual changes in the microcantilever curvature over time. Curvature- temperature-time experiments are used to examine the effects of hold temperature and maximum annealing temperature on the inelastic response of the Au films. Experiments reveal inelastic strains in the Au films due to creep, recovery, and microstructural coarsening. At moderate hold temperatures, 30 °C

Duke Scholars

Ken Gall
Author Ken Gall Thomas Lord Department of Mechanical Engineering and Materia ...

Published In

Acta Materialia

DOI

10.1016/j.actamat.2004.01.005

ISSN

1359-6454

Publication Date

May 3, 2004

Volume

52

Issue

8

Start / End Page

2133 / 2146

Related Subject Headings

  • Materials
  • 5104 Condensed matter physics
  • 4017 Mechanical engineering
  • 4016 Materials engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics
 

Citation

APA
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ICMJE
MLA
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Gall, K., West, N., Spark, K., Dunn, M. L., & Finch, D. S. (2004). Creep of thin film Au on bimaterial Au/Si microcantilevers. Acta Materialia, 52(8), 2133–2146. https://doi.org/10.1016/j.actamat.2004.01.005
Gall, K., N. West, K. Spark, M. L. Dunn, and D. S. Finch. “Creep of thin film Au on bimaterial Au/Si microcantilevers.” Acta Materialia 52, no. 8 (May 3, 2004): 2133–46. https://doi.org/10.1016/j.actamat.2004.01.005.
Gall K, West N, Spark K, Dunn ML, Finch DS. Creep of thin film Au on bimaterial Au/Si microcantilevers. Acta Materialia. 2004 May 3;52(8):2133–46.
Gall, K., et al. “Creep of thin film Au on bimaterial Au/Si microcantilevers.” Acta Materialia, vol. 52, no. 8, May 2004, pp. 2133–46. Scopus, doi:10.1016/j.actamat.2004.01.005.
Gall K, West N, Spark K, Dunn ML, Finch DS. Creep of thin film Au on bimaterial Au/Si microcantilevers. Acta Materialia. 2004 May 3;52(8):2133–2146.
Journal cover image

Published In

Acta Materialia

DOI

10.1016/j.actamat.2004.01.005

ISSN

1359-6454

Publication Date

May 3, 2004

Volume

52

Issue

8

Start / End Page

2133 / 2146

Related Subject Headings

  • Materials
  • 5104 Condensed matter physics
  • 4017 Mechanical engineering
  • 4016 Materials engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics